“…Hardness sensing especially for soft material is one of important problem in many fields such as foods industry and material science, including robotics [1][2][3][4][5][6][7][8][9][10][11].For application, the hardness sensing used many fields such as breast cancer diagnosis [6,12], tension-type headache from the musculoskeletal complaints [13,14], trapezius muscle hardness changes from the reason of visual display terminal height [15], muscle hardness measurements using ultrasound [16,17], hardness sensing using optical (IR frequency) techniques [18].As the force sensor, gauge sensor has been used for the hardness measurement. Since gauge sensor measures a distortion of metal, the accuracy of weak force range (0.1 to few N) inevitably drops, and it is considered difficult to measure the hardness of soft material [3,[19][20][21][22][23][24][25][26][27][28]. PTF sensor, on the other hand, is designed for weak force range (about 0.1 to 20 N), but the high reliability could not be realized by the instability of the contact area change of the two membranes inside the sensor (Fig.…”