A self-protecting uncooled microbolometer structure for uncooled microbolometer

Jo, Youngmin; Kwon, Il-Woong; Kim, Dong Soo; Shim, Hyunchul; Lee, Hee Chul

doi:10.1117/12.884432

Cited by 7 publications

(3 citation statements)

References 6 publications

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“…Many research institutes developing infrared array readout circuits are working on algorithms and techniques to compensate the self-heating phenomenon effects on sensitivity and accuracy of an infrared detector. Some of these methods are made in software, but sometimes as presented [15] they involve hardware changes in the detector structure, for example by adding an additional bimorph leg. A software solution to compensate the self-heating phenomenon will be elaborated in future.…”

Section: Discussionmentioning

confidence: 99%

Measurement of Thermal Behavior of Detector Array Surface with the Use of Microscopic Thermal Camera

Bieszczad¹,

Kastek²

2011

Metrology and Measurement Systems

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Modern infrared cameras are constructed with two main types of infrared detectors: photon detectors and thermal detectors. Because of economic reasons, vast numbers of modern thermal cameras are constructed with the use of infrared microbolometric detectors which belong to the group of thermal detectors. Thermal detectors detect incident infrared radiation by measuring changes of temperature on the surface of a special micro-bridge structure. Thermal detectors, like microbolometric detectors on one hand should be sensitive to changing temperature to accurately measure incoming infrared radiation from the observed scene, on the other hand there are many other phenomena that change the temperature of the detector and influence the overall response of the detector. In order to construct an accurate infrared camera, there is a need to evaluate these phenomena and quantify their influence. In the article the phenomenon of self heating due to the operation of the readout circuit is analyzed on an UL 03 19 1 detector. The theoretical analysis is compared with the results of conducted measurements. Measurements with a type SC7900VL thermographic camera were performed to measure the thermodynamic behavior of the UL 03 19 1 detector array.

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Section: Discussionmentioning

confidence: 99%

Measurement of Thermal Behavior of Detector Array Surface with the Use of Microscopic Thermal Camera

Bieszczad¹,

Kastek²

2011

Metrology and Measurement Systems

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“…Such a development has achieved noise equivalent temperature differences (NETD) at a very low level, around 50 mK (F/1 lens, 30 Hz frame rate, 300 K background) [ 33 , 34 ]. At ultra-small pixel pitches (less than 12 µm), the performances could be kept to the cost of a very high thermal insulator, leading to a dramatic temperature increase of the suspended plate, which can be deleterious for the electrical properties of the sensing material [ 35 ]. Both VOX and a-Si microbolometers can be affected [ 36 ].…”

Section: Introductionmentioning

confidence: 99%

Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging

et al. 2018

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Microbolometers arethe most common uncooled infrared techniques that allow 50 mK-temperature resolution to be achieved on-scene. However, this approach struggles with both self-heating, which is inherent to the resistive readout principle, and 1/f noise. We present an alternative approach that consists of using micro/nanoresonators vibrating according to a torsional mode, and whose resonant frequency changes with the incident IR-radiation. Dense arrays of such electromechanical structures were fabricated with a 12 µm pitch at low temperature, allowing their integration on complementary metal-oxide-semiconductor (CMOS) circuits according to a post-processing method. H-shape pixels with 9 µm-long nanorods and a cross-section of 250 nm × 30 nm were fabricated to provide large thermal responses, whose experimental measurements reached up to 1024 Hz/nW. These electromechanical resonators featured a noise equivalent power of 140 pW for a response time of less than 1 ms. To our knowledge, these performances are unrivaled with such small dimensions. We also showed that a temperature sensitivity of 20 mK within a 100 ms integration time is conceivable at a 12 µm pitch by co-integrating the resonators with their readout electronics, and suggesting a new readout scheme. This sensitivity could be reached short-term by depositing on top of the nanorods a vanadium oxide layer that had a phase-transition that could possibly enhance the thermal response by one order of magnitude.

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“…Such a development has achieved Noise Equivalent Temperature Differences (NETD) at a very low level around 50 mK (F/1 lens, 30 Hz frame rate, 300 K background) [33], [34]. At ultra-small pixel pitch (less than 12µm), the performances could be kept at the cost of a very high thermal insulation leading to a dramatic temperature increase of the suspended plate that can be deleterious for the electrical properties of the sensing material [35].…”

Section: Introductionmentioning

confidence: 99%

Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging

Duraffourg

Laurent

Moulet

et al. 2018

Preprint

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Microbolometer is the most common uncooled infrared technique that allows to achieve 50mK-temperature resolution on the scene. However, this approach has to struggle with both the self-heating inherent to the resistive readout principle and the 1/f noise. We present an alternative approach that consists in using micro / nanoresonators vibrating according to a torsional mode, and whose resonant frequency changes with the incident IR-radiation. Dense arrays of such electromechanical structures were fabricated with a 12µm-pitch at low temperature allowing their integration on CMOS circuits according to a post-processing method. H-shape pixels with 9 µm-long nano-rods and a cross-section of 250 × 30 nm² were fabricated to provide large thermal responses, whose experimental measurements reached up to 1024 Hz/nW. These electromechanical resonators featured a noise equivalent power of 140pW for a response time of less than 1 ms. To our knowledge, these performance are unrivaled with such small dimensions. We also showed that a temperature sensitivity of 20 mK within 100ms-integration time is conceivable at a 12µm-pitch by co-integrating the resonators with their readout electronics and suggesting a new readout scheme. This sensitivity could be reached at short-term by depositing on top of the nano-rods a vanadium oxide layer having a phase-transition that could possibly enhance the thermal response by one order of magnitude.

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A self-protecting uncooled microbolometer structure for uncooled microbolometer

Cited by 7 publications

References 6 publications

Measurement of Thermal Behavior of Detector Array Surface with the Use of Microscopic Thermal Camera

Measurement of Thermal Behavior of Detector Array Surface with the Use of Microscopic Thermal Camera

Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging

Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging

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