Nano Online 2016
DOI: 10.1515/nano.bjneah.6.46
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A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

Abstract: We describe an atomic force microscope (AFM) for the characterization of self-sensing tunneling magnetoresistive (TMR) cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 × 5 μm 3 is mounted on a large-area scanner with a scan range of 800 × 800 × 35 μm 3. In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflection set… Show more

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