A scanning photon microscope for non-destructive observations of crystal defect and interface trap distributions in silicon wafers

Kinameri, K; Munakata, Chusuke; Mayama, K.

doi:10.1088/0022-3735/21/1/017

Cited by 38 publications

(17 citation statements)

References 17 publications

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“…First, its noise level (and hence minimum attainable signal) is much better than that of the Kelvin probe and can be rather easily reduced to the mV or sub-mV level [215]. Note that a mV noise level is also attained at the output of the lock-in ampli®er used in Kelvin probe measurements.…”

Section: Mis Structuresmentioning

confidence: 99%

“…Recently, Hla Âvka and S Ï vehla [216] have reexamined the frequency response of a MIS structure for SPV measurements, using the more general equivalent circuit shown in Fig. 27(b) [215,216], where R s is the (often negligible) sample resistance, R i is the Voltmeter resistance, and C i is the Voltmeter capacitance (including lead capacitance). They have noted that V meas 3 SPV as long as Z i ) Z s , where…”

Section: Mis Structuresmentioning

confidence: 99%

“…Kozhevin [219] provided an early demonstration of a line-scan of the SPV at a`real' MIS capacitor, by scanning the surface with a narrow, modulated, light beam. More recently, Munakata et al [215] have designed a`¯ying spot' scanning SPV apparatus. The device is based on an`arti®cial' MIS structure involving the sample under study.…”

Section: Mis Structuresmentioning

confidence: 99%

See 2 more Smart Citations

Surface photovoltage phenomena: theory, experiment, and applications

Kronik

Shapira

1999

Surface Science Reports

1,522

804

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Section: Mis Structuresmentioning

confidence: 99%

Section: Mis Structuresmentioning

confidence: 99%

See 1 more Smart Citation

Surface photovoltage phenomena: theory, experiment, and applications

Kronik

Shapira

1999

Surface Science Reports

1,522

804

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“…For this reason, inspection of TSP electrodes by the naked eye is difficult. Although inspection by electrical probe tip can be used, it takes a very long time to check the entire area of a TSP panel, due to its narrow probe area [4,5].…”

Section: Introductionmentioning

confidence: 99%

Operating Voltage of Optical Instruments based on Polymer-dispersed Liquid Crystal for Inspecting Transparent Electrodes

Yeo

Lee

2017

Current Optics and Photonics

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Optical instruments based on polymer-dispersed liquid crystal (PDLC) have been used to inspect transparent electrodes. Generally the operating voltage of an inspection instrument using PDLC is very high, over 300 V, reducing its lifetime and reliability. The operating-voltage issue becomes more serious in the inspection of touch-screen panel (TSP) electrodes, due to the bezel structure protruding over the electrodes. We have theoretically calculated the parameters affecting the operating voltage as a function of the distance between the TSP and the PDLC, the thickness, and the dielectric constant of the sublayers when the inspection module was away from the TSP electrodes. We have experimentally verified the results, and have proposed a way to reduce the operating voltage by substituting a plastic substrate film with a hard coating layer of smaller thickness and higher dielectric constant.

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“…Actually, the SPV technique has been applied to the detection of radiation damage 8) and resistivity striation. 8,9) When photocarriers stored in a capacitor are gradually annihilated, the iSPV must also decrease similarly to the photoconductivity of the depletion layer. Accordingly, the iSPV may give another decay time, which corresponds in principle to the surface decay time of the photoconductivity.…”

mentioning

confidence: 99%

Finite-dimensional randomness

Sinai¹

1991

Russ. Math. Surv.

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The fixed oxide charge in a p-type silicon wafer forms a depletion layer composing a capacitor at the wafer surface, and an impulse surface photovoltage (iSPV) appears across the depletion layer when photocarriers excited by an impulse photon beam are stored in the capacitor. The iSPV eventually disappears when excess electrons and holes in the capacitor recombine with each other through conductive paths owing to crystal imperfection and/or interface traps. Two decay times of 7.3 and 8.4 ms have been observed for the original mirror-polished and additionally dry-etched surfaces of a sample wafer of 75 mm diameter; the longer decay time suggests higher crystal quality.

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A scanning photon microscope for non-destructive observations of crystal defect and interface trap distributions in silicon wafers

Cited by 38 publications

References 17 publications

Surface photovoltage phenomena: theory, experiment, and applications

Surface photovoltage phenomena: theory, experiment, and applications

Operating Voltage of Optical Instruments based on Polymer-dispersed Liquid Crystal for Inspecting Transparent Electrodes

Finite-dimensional randomness

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