1975
DOI: 10.1016/0030-4018(75)90012-7
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A rotating-compensator fourier ellipsometer

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Cited by 102 publications
(49 citation statements)
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“…1, the reflected light from the surface of the sample passes through the rotating compensator and the linear polarizer before detection by the CCD camera. In this system, the detected signal intensity I, is described as a function of the angle of the compensator, θ m , as, 24,25 …”
Section: Methodsmentioning
confidence: 99%
“…1, the reflected light from the surface of the sample passes through the rotating compensator and the linear polarizer before detection by the CCD camera. In this system, the detected signal intensity I, is described as a function of the angle of the compensator, θ m , as, 24,25 …”
Section: Methodsmentioning
confidence: 99%
“…The photodiode voltage was observed on an oscilloscope and transferred to a computer for analysis. The photodiode signals were evaluated to obtain the polarization in terms of the Stokes vector components [25]. The polarization states are calculated as Stokes vectors and presented graphically in either 2D or 3D projections of the Stokes vector space.…”
Section: Methodsmentioning
confidence: 99%
“…The light intensity changes by the rotation of compensator, whose azimuth is C, is expressed by sinusoidal function as [29,30], Figure 12. Typical SEM micrograph of particles suspended in plasma for 3 h.…”
Section: Experimental Setup For Imaging Mie-scattering Ellipsometrymentioning
confidence: 99%