2021
DOI: 10.1016/j.ymssp.2020.107393
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A review of recent studies on piezoelectric pumps and their applications

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Cited by 89 publications
(40 citation statements)
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References 229 publications
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“…Piezoelectric pumps are composed of a piezoelectric actuator and valve body (Chen et al, 2020;Kaynak et al, 2016;Li et al, 2021; J. T. Mohith et al, 2019;Opekar et al, 2016;Tang et al, 2019;Valdovinos et al, 2014;Wang et al, 2019;Y.-N. Wang & Fu, 2018;Yin et al, 2020). The actuator provides power for the fluid and the valve body plays a diversion role, so as to achieve unidirectional fluid pumping.…”
Section: Vpmgrf and Its Recirculating Flowmentioning
confidence: 99%
“…Piezoelectric pumps are composed of a piezoelectric actuator and valve body (Chen et al, 2020;Kaynak et al, 2016;Li et al, 2021; J. T. Mohith et al, 2019;Opekar et al, 2016;Tang et al, 2019;Valdovinos et al, 2014;Wang et al, 2019;Y.-N. Wang & Fu, 2018;Yin et al, 2020). The actuator provides power for the fluid and the valve body plays a diversion role, so as to achieve unidirectional fluid pumping.…”
Section: Vpmgrf and Its Recirculating Flowmentioning
confidence: 99%
“…Among them, piezoelectric pumps have attracted more and more attention for their outstanding advantages such as high energy density, fast response speed, large driving force, and easy integration. According to whether there are valves inside, piezoelectric pumps can be divided into valve piezoelectric pumps and valveless piezoelectric pumps (Singhal et al, 2004;Li et al, 2021). The valve piezoelectric pump has a movable valve, which can avoid backflow and generate a larger output pressure.…”
Section: Introductionmentioning
confidence: 99%
“…Changing the physical structure of piezoelectric pumps to reduce its backflow and improve its output performance is a good method. Zhang et al [14] analyzed several representative piezoelectric pumps from four perspectives: the structural design, working mode, optimization, and application of the piezoelectric pump. Huang et al [15] analyzed and studied the output performance of valveless piezoelectric pumps with vortex diodes.…”
Section: Introductionmentioning
confidence: 99%