successfully provide accurate information for real-time monitoring and control of the entire distributed power system. Especially, it is important to develop a high-volume manufacturing technology employing small size and inexpensive sensors. Currently, there are various current sensors (Ziegler et al. 2009), and they have been developed as small, lightweight and low-cost units (Votzi et al. 2011;Moghe et al. 2012). However, a thin film based flexible clamp-type current sensor has yet to be made.We had reported in our previous studies, a flexible current clamp sensor was fabricated by thin film materials and screen-printed coil ( Fig. 1), and a novel fabrication process of the sensor using a reel-to-reel system was proposed (Yamashita et al. 2014). In this paper, we added new data which is necessary for the current sensor applications, and we also report on many more detailed characteristics of the device.
FabricationA fabrication process of the current sensor is schematically shown in Fig. 2. The detailed fabrication flow begins with a 25 μm coat of polyimide on the both sides of a 50-mmlong, 10-mm-wide and 20-μm-thick permalloy film as a magnetic core. In this work, we bonded 50-mm-long, 20-mm-wide and 25-μm-thick kapton films to the permalloy film by thermal compression bonding. Then we made through-holes 60 μm in diameter and height of 50 μm in the kapton film at 100 μm intervals along the lateral border of the permalloy film by laser drilling. An optical microscope image of the permalloy film coated with kapton films after through-holes laser drilling process is shown in Fig. 3. Then we made silver paste coil using a screen-printer (MT-320TV, Micro-tec Co., Ltd). Line/space = 50/50 μm (480 turns) that are developed in order to increase the coil turns.Abstract This paper reports a novel flexible current clamp sensor with 480 turns silver paste coil (line/ space = 50/50 μm) formed by through-holes and screenprinting technologies. Using screen-printing techniques, fine stripe patterns could be formed on a 50-mm-long and 10-mm-wide polyimide film in few seconds. Coil resistance between their contact pads is about 2.3 kΩ. When the value of a primary current was 20 A, the output voltage was 22.6 mV. Furthermore, the output voltage changed linearly with the changing of the primary current in the 0-20 A range. The sensor is developed using only coating, throughholes laser drilling, and screen-printing technologies. Therefore it can be fabricated by a reel-to-reel continuous film processing system.