A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz^1/2 Noise Floor

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

“…Zhao and Seshia et al [ 103 ] (2019) at Cambridge University developed a resonant MEMS accelerometer with a noise floor of 98 ng/√Hz (at 1 Hz), a bias stability of 56 ng and a bandwidth of 5 Hz, which comprised a single DETF, sandwiched between two proof masses, as shown in Figure 18 a. The single DETF operated in the second lateral transverse mode though a differential driving configuration, as shown in Figure 18 b, which led to a higher critical linear amplitude and thus a higher sensitivity.…”

“…Since the two DETFs were situated on either side of a proof mass, they experienced a differential axial force due to input gravitational acceleration resulting in a differential frequency shift signal. The accelerometer featured a scale factor of 960 Hz/m/s 2 Zhao and Seshia et al [103] (2019) at Cambridge University developed a resonant MEMS accelerometer with a noise floor of 98 ng/√Hz (at 1 Hz), a bias stability of 56 ng and a bandwidth of 5 Hz, which comprised a single DETF, sandwiched between two proof masses, as shown in Figure 18a. The single DETF operated in the second lateral transverse mode though a differential driving configuration, as shown in Figure 18b, which led to a higher critical linear amplitude and thus a higher sensitivity.…”

“…The single DETF operated in the second lateral transverse mode though a differential driving configuration, as shown in Figure 18b, which led to a higher critical linear amplitude and thus a higher sensitivity. Besides, due to the single DETF design with inverting levers, oscillator cross-talk and undesired locking could be avoided, which commonly exist in a conventional two DETF design [100,102] Zhao and Seshia et al [103] (2019) at Cambridge University developed a resonant MEMS accelerometer with a noise floor of 98 ng/ √ Hz (at 1 Hz), a bias stability of 56 ng and a bandwidth of 5 Hz, which comprised a single DETF, sandwiched between two proof masses, as shown in Figure 18a.…”

“…Besides, due to the single DETF design with inverting levers, oscillator cross-talk and undesired locking could be avoided, which commonly exist in a conventional two DETF design [100,102] due to the mechanical coupling of the two DETFs. Zhao and Seshia et al [103] (2019) at Cambridge University developed a resonant MEMS accelerometer with a noise floor of 98 ng/√Hz (at 1 Hz), a bias stability of 56 ng and a bandwidth of 5 Hz, which comprised a single DETF, sandwiched between two proof masses, as shown in Figure 18a. The single DETF operated in the second lateral transverse mode though a differential driving configuration, as shown in Figure 18b, which led to a higher critical linear amplitude and thus a higher sensitivity.…”

“…[39] 10-50 ng/√Hz (at 1 Hz) ±1.4 g 13.2 Hz + Edalatfar et al [44] 350 ng/√Hz (at 1-5 kHz) 135 dB 4500 Hz + Yazdi and Najafi [45] 160 ng/√Hz --<1000 Hz + Aaltonen et al [9] 300 ng/√Hz (at 30 Hz) ±1.5 g 300 Hz +^ Xu et al [11] 200 ng/√Hz (at 100 Hz) ±1.2 g 700 Hz ^ Utz and Kraft et al [55] 216 ng/√Hz (at 30-40 Hz) ±1. 25 [100] 144 ng/√Hz (at <1-50 Hz) ±0.05 g 1-50 Hz +^& Pandit and Seshia et al [102] 17.8 ng/√Hz (at 0.25-4 Hz) ±1 g 5 Hz +^& Zhao and Seshia et al [103] 98 ng/√Hz (at 1 Hz) ±1 g 5 Hz +^& Yin et al [104] 380 ng/√Hz ±15 g 2.7 Hz +^& Zhao and Seshia et al [116] 680 ng/√Hz (at 0.5-3 Hz) --3 Hz ^& Figure 24. Comparison of micromachined accelerometers with a sub-µg/ √ Hz noise floor.…”