2021
DOI: 10.1016/j.sna.2020.112508
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A rapid and controllable acoustothermal microheater using thin film surface acoustic waves

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Cited by 32 publications
(26 citation statements)
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“…Previous SAW-based DNA amplification works [14][15] used crystal based piezoelectric devices (such as LiNbO3), which are brittle and costly. Thin film SAW has also recently been demonstrated as efficient microheaters [52]. Herein this study, we used ZnO/Al sheet SAW devices [51][53].…”
Section: E Saw Device Fabrication and Surface Treatmentmentioning
confidence: 99%
“…Previous SAW-based DNA amplification works [14][15] used crystal based piezoelectric devices (such as LiNbO3), which are brittle and costly. Thin film SAW has also recently been demonstrated as efficient microheaters [52]. Herein this study, we used ZnO/Al sheet SAW devices [51][53].…”
Section: E Saw Device Fabrication and Surface Treatmentmentioning
confidence: 99%
“… 14 When optimizing dPCR on a chip, thermal non-uniformity is usually not considered as measurement of sample temperature ( T S ) inside partitions with a sample volume of pico-/nano-liters is a challenging job. 15,16 An accurate system to calibrate a temperature sensor with respect to the fluid inside the partitions, and enable determination of the temperature distribution over the dPCR chip, or even between the partitions, would benefit the optimization of temperature uniformity, 17 thus improving PCR efficiency.…”
Section: Introductionmentioning
confidence: 99%
“…The latter, on the other hand, involves the use of chip-scale high frequency nanometer amplitude electromechanical excitation in the form of surface acoustic waves (SAWs), whose unprecedented surface vibrational acceleration on the order of 10 million g ’s provides a mechanism for interfacial destabilization 16 that is highly effective for the generation of micron-dimension aerosol droplets 17 , 18 for applications across pulmonary drug delivery 19 , thermal management 20 , water filtration 21 , thin-film deposition 22 , mass spectrometry 23 , 24 , and material synthesis/crystallization 25 , 26 . Additionally, SAWs have been shown to be a powerful vehicle for manipulating microscale fluids for a host of microfluidic applications, such as liquid and drop transport 27 , 28 , tensiometry 29 , mixing 30 , 31 , sorting 32 , heating 33 , greywater treatment 34 , and bubble/particle trapping and manipulation 35 38 .…”
Section: Introductionmentioning
confidence: 99%