A process for low cost wire grid polarizers

Fabrication of self-aligned multilevel nanostructures

“…3 is an asymmetric multilevel grating structure which has applications in nanophotonic devices such as metamaterial wire-grid polarizers (WGP).Most high-performance WGPs are fabricated by RIE of the polarizing metal such as Al. WGPs have also been previously demonstrated by shadowing angle deposition or glancing angle deposition (GLAD) of the polarizing metal [51]- [53], thus circumventing Al RIE, which is an expensive process. The process demonstrated here, thus follows the GLAD approach in order to remain cost-effective.…”

Visually tolerable tiling (VTT) for making a large-area flexible patterned surface

“…Watts et al reported that the seam width needs to be narrower than 500 nm to be undetectable by the naked eye from their reports. 11 In both the directions of parallel (Fig. 1c) and perpendicular (Fig.…”

Quasi-seamless stitching for large-area micropatterned surfaces enabled by Fourier spectral analysis of moiré patterns

“…to fabricate large-area master molds 24,25,27,29 . Although multiple-stitched exible molds have been widely used in roll-based NIL, there is a critical limit to satisfying the requirements of practical applications because of the clear formation of alignment marks and stitching seams, which are easily detectable by the naked eye 23,30 . As alternatives, novel mechanical approaches, such as dynamic nanoinscribing 26 , nanochannel-guided lithography 31 , and vibrational indentation-driven patterning 32 , have been proposed…”