A precision positioning rotary stage driven by multilayer piezoelectric stacks

Liu, Ruixuan; Wen, Zhiyi; Cao, Teng; Lu, Chunyao; Wang, Boquan; Wu, Dawei; Li, Xiaoniu

doi:10.1016/j.precisioneng.2022.03.013

Cited by 8 publications

(5 citation statements)

References 16 publications

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“…electric field. Due to the advantages such as small stroke and high force output, PZT stack actuators are being investigated in a variety of applications in recent years, including precision positioning [1,2], active vibration control [3,4], energy harvesting [5,6], and others [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Dynamic responses of normal and partially failed piezoelectric stack actuators under sinusoidal voltages with DC biasing

Yang,

Mao,

et al. 2024

Smart Mater. Struct.

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Piezoelectric (PZT) stack actuators are widely used in many fields due to the advantages such as small stroke and high force output. However, failures of one or more PZT layers may exist in PZT stacks and then have influences on their performances. This paper investigates dynamic responses of normal and partially failed PZT stack actuators, in order to evaluate the influences of a failed layer at different positions and furthermore explore the rules, which is of great significance for understanding and improving the performances of partially failed PZT stack actuators. Firstly, a group of experiments were performed and responses of PZT stacks were obtained under sinusoidal voltages with DC biasing. Then a multiple degree-of-freedom (DOF) spring-mass system was built as a theoretical model which was verified by the experimental results to simulate output responses of PZT stack actuators. Based on that, the influences of a failed PZT layer at different positions in the stack were obtained by solving the model under various conditions. The results reveal that the farther the failed PZT layer is from the fixed end, the more significant the influences on the displacement or force output of the PZT stack are. Moreover, the rules of influences of a failed PZT layer at different positions were expressed as a general formula which can be used to better understand, evaluate or identify health conditions of PZT stack actuators.

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Section: Introductionmentioning

confidence: 99%

Dynamic responses of normal and partially failed piezoelectric stack actuators under sinusoidal voltages with DC biasing

Yang,

Mao,

et al. 2024

Smart Mater. Struct.

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“…Nanopositioning stages with high accuracy and fast response are widely used in nanomanipulation and microassembly, including micropart assembly, nanoimprinting, biological cell arrangement, and non-contact optical scanning. [1][2][3] Usually, nanopositioning stages provide multiple degree-of-freedom (DoF) motions to carry upper operation equipment (e.g. a microgripper, micropipette, or microprobe) to achieve precision positioning and posture adjustment of manipulated objects.…”

Section: Introductionmentioning

confidence: 99%

“…4,5 The piezoelectric actuation is popular owing to its high displacement resolution, large driving force, and rapid response. [3][4][5][6] Moreover, the nanopositioning stage requires a large workspace, multi-DoF motions, a compact size, and smooth movement for nanomanipulation. 7,8 Therefore, flexure-based compliant mechanisms are used to magnify the output displacement of the piezoelectric stack actuator (PSA) to realize an extensive working range (i.e.…”

Section: Introductionmentioning

confidence: 99%

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Yang

et al. 2023

Proceedings of the Institution of Mechanical Engineers, Part C:

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The article covers structural design and disturbance rejection control of a flexure-based compliant piezoelectric nanopositioning stage. The stage is devised using four-bar amplification mechanisms, auxiliary guiding mechanisms, and a compound parallelogram mechanism. Static and dynamic models of compliant mechanisms are analyzed based on a compliance matrix method. A modified Prandtl-Ishlinskii (PI) model with dead zone operators is used to describe the asymmetric hysteresis. Then, a global electromechanical dynamic model is built and identified. A comprehensive disturbance rejection controller (CDRC) combining a robust H∞ control and a disturbance observer-based (DOB) control is proposed for high trajectory tracking accuracy and anti-disturbance performance. The trajectory tracking accuracy of the stage can be up to 3 nm in experiments. As amplitudes of reference signals increases, relative tracking errors gradually decrease. System instability and oscillation caused by strong external disturbances are also reduced. Experimental results prove the effectiveness of the developed CDRC.

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“…High precision micro conveyances devices, as important elements in high precision positioning systems [1][2][3], play vital roles in many scientific and industrial fields, such as bio-medicine [4,5], optical systems [6], micro-factory [7,8], micro-manipulation [9][10][11], etc. The stick-slip principle, which can achieve large precise displacement with high efficiency and generate large actuating force [12], is an ideal principle for high precision driving, having drawn widespread attention.…”

Section: Introductionmentioning

confidence: 99%

“…The main drawback is its backward motion [13][14][15][16][17]. In recent years, many micro conveyance devices [1][2][3]6,18,19] based on the stick-slip principle have been rapidly developed.…”

Section: Introductionmentioning

confidence: 99%

Experimental Characterization of a Stick-Slip Driving Micro Conveyance Device Consisting of Digital Actuators

Huyan

Huang

et al. 2022

Actuators

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Micro conveyance devices are important elements in high precision positioning systems, which play vital roles in many scientific and industrial fields and are widely needed in many applications. This work presents the modeling and experimental validation of a pre-designed and fabricated micro conveyance device. This micro conveyance device consists of eight elementary electromagnetic digital actuators and can realize a conveyance application based on a stick-slip driving principle. A dynamic model based on the prototype device was established for stick-slip displacement simulation. Four sub-models of the dynamic model regarding the calculation of actuation force and friction force within the device were built and integrated. Experiments focusing on the conveyance application were carried out to test the performance of the prototype device. It has been observed that the simulated results obtained using the dynamic model were in good agreement with the experiment results. The proposed device suggests an alternative to the micro conveyance system.

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A precision positioning rotary stage driven by multilayer piezoelectric stacks

Cited by 8 publications

References 16 publications

Dynamic responses of normal and partially failed piezoelectric stack actuators under sinusoidal voltages with DC biasing

Dynamic responses of normal and partially failed piezoelectric stack actuators under sinusoidal voltages with DC biasing

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Experimental Characterization of a Stick-Slip Driving Micro Conveyance Device Consisting of Digital Actuators

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