A polyimide-based capacitive humidity sensor

Schubert, Peter J.; Nevin, Joseph H.

doi:10.1109/t-ed.1985.22104

Cited by 143 publications

(64 citation statements)

References 7 publications

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“…A number of studies reported successful results with capacitive humidity sensors that use polyimide as a sensitive substrate [55]- [58]. Commercial sensors are available for measurement of moisture in air, transformer oil, and gasoline.…”

Section: ) Centimeter and Millimeter Scale Substratesmentioning

confidence: 99%

Interdigital sensors and transducers

et al. 2004

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Section: ) Centimeter and Millimeter Scale Substratesmentioning

confidence: 99%

Interdigital sensors and transducers

et al. 2004

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“…That of water is about 80 [23,24], and as such causes a large change in capacitance upon absorption by a polymer. Looyenga's equation for the dielectric constant of a water-absorbing polymer is given by [24,25]:…”

Section: Sensing Principlementioning

confidence: 99%

A Simple Capacitive Sensor Array Based on a Metal-Insulator-Metal Structure

Lee¹,

Choi²,

Ahn³

et al. 2012

Journal of Sensor Science and Technology

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A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: 2.7 x 2.7 mm 2 ; mid-size: 1.5 x 1.5 mm 2 ; small-size: 0.7 x 0.7 mm 2 ) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full range of relative humidity (RH) with excellent linearity(correlation coefficient > 0.994). This array structure exhibits unique advantages including easy fabrication process, high batch productivity, and high structural compatibility with various substrate materials. It is anticipated that this device structure will be potentially useful in unique applications including mapping spatial humidity variations over a meso-scale area and implementing flexible humidity sensing element arrays.

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“…Researchers are working hard to improve the performance of humidity sensor such as fast response, good sensitivity and small hysteresis. There are several transduction techniques for designing humidity sensors: for example, resistive, capacitive, optical, mechanical and acoustic techniques [1][2][3][4][5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%