Abstract:A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: 2.7 x 2.7 mm 2 ; mid-size: 1.5 x 1.5 mm 2 ; small-size: 0.7 x 0.7 mm 2 ) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full … Show more
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