A PMUT Integrated Microfluidic System for Fluid Density Sensing

Roy, Kaustav; Kalyan, Kritank; Ashok, Anuj; Shastri, Vijayendra; Jeyaseelan, A. Antony; Mandal, Avinandan; Pratap, Rudra

doi:10.1109/jmems.2021.3091651

Cited by 19 publications

(12 citation statements)

References 25 publications

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“…Additionally, note how the density plays an important role in the mass loading (β), achieving the highest value when FC-70 is used (lower frequency), even though this sample has 27 times lower viscosity than 100% of glycerol. To evaluate the sensitivity as demonstrated in 22 , the experimental data points were fitted (excluding 100% glycerol due to its high viscosity). The curve fitted using f media /f air is a linear function with a slope of −1.089e-4 [1/kg/m 3 ] and intercept of 0.55; see Fig.…”

Section: Resultsmentioning

confidence: 99%

“…However, a pair of PMUTs are needed and, only low viscosity fluids can be measured. To overcome these drawbacks, in 22 , an array is presented where the individual element is a dual-electrode PMUT that facilitates detection of the density change at the expense of decreasing sensitivity (26.3 Hz/kg/m 3 , which is still in the range of the human blood density).…”

Section: Introductionmentioning

confidence: 99%

“…Different from our previous works 24 , 25 , in this paper AlN doped with Sc is used as the piezoelectric material, providing benefits in terms of piezoelectric transduction coefficients 26 . This single-cell or lab-on-chip for liquid characterization could be easily integrated in a microfluidic cell or hand-held devices of small size, which will make it competitive with respect to other systems 2 , 21 , 22 .…”

Section: Introductionmentioning

confidence: 99%

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Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

et al. 2022

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In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m3 demonstrates the potential of the system compared to other dual-electrode PMUTs. In addition, according to the acoustic measurement, the sound velocity, fluid compressibility, and viscosity coefficient can be extracted, which, to the best of our knowledge, is novel in these PMUT systems.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

et al. 2022

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“…To address this drawback, a single-cell PMUT in a dual-electrode configuration has been developed and analyzed for density sensing [ 99 ]. Roy et al have further developed and investigated the sensing performance of a dual-electrode PMUT integrated with a microfluidic channel to identify the density variation in human blood [ 100 ]. The developed circular PMUT comprised PZT material of 500 nm thickness as the active piezoelectric layer along with gold-sensing and drive electrodes placed on a platinized SOI wafer, as illustrated in Figure 20 .…”

Section: Pmut Applicationsmentioning

confidence: 99%

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

Birjis

Swaminathan

Nazemi

et al. 2022

Sensors

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With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system’s performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer’s sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented.

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“…The electromagnetic properties of light in conjunction with the penetrability of sound have made it possible to penetrate deeper and obtain information that is functional to the target thus probed. Pulsed LEDs and MUTs [24][25][26][27][28][29][30][31][32][33][34][35][36][37] have revolutionized the field further, thereby creating wearable photoacoustic devices. In this work, we have fabricated piezoelectric micromachined ultrasound transducers (PMUTs) using functional thin-film piezoelectric material and the nanofabrication tools and have demonstrated their use as a photoacoustic receiver.…”

Section: Introductionmentioning

confidence: 99%

A PMUT based photoacoustic system as a microfluidic concentration detector

Roy

Shastri

Kumar

et al. 2022

Photons Plus Ultrasound: Imaging and Sensing 2022

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We report on the development of a novel piezo-MEMS based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (~31) and its wide fractional bandwidth (~73%).

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A PMUT Integrated Microfluidic System for Fluid Density Sensing

Cited by 19 publications

References 25 publications

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

A PMUT based photoacoustic system as a microfluidic concentration detector

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