A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

Savov, Angel; Joshi, Shivani; Shafqat, Salman; Louwerse, M.C.; Stoute, R.L.; Dekker, R.

doi:10.3390/mi9010039

Cited by 3 publications

(6 citation statements)

References 30 publications

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“…Since these specimen do not possess enough natural contrast, a nanopattern needs to be applied to enable Digital Height Correlation (DHC), which is a special form of DIC that yields three-dimensional surface displacement fields by correlating surface height profiles, here measured with an optical confocal profilometer. The microfabricated specimen is 50 μm tall and micromachined from a 300-nm thick, sputter-deposited layer of 99.99999% Al [64]. As discussed Ref.…”

Section: Freestanding Highly Stretchable Mems Specimen: (Topographical Pattern On An Extremely Physically Delicate Specimen)mentioning

confidence: 99%

Cool, Dry, Nano-scale DIC Patterning of Delicate, Heterogeneous, Non-planar Specimens by Micro-mist Nebulization

Shafqat

2021

Exp Mech

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Background: Application of patterns to enable high-resolution Digital Image Correlation (DIC) at the small scale (μm/nm) is known to be very challenging as techniques developed for the macro- and mesoscale, such as spray painting, cannot be scaled down directly. Moreover, existing nano-patterning techniques all rely on harsh processing steps, based on high temperature, chemicals, physical contact, liquids, and/or high vacuum, that can easily damage fragile, small-scale, free-standing and/or hygro-sensitive specimens, such as MEMS or biological samples. Objective: To present a straightforward, inexpensive technique specially designed for nano-patterning highly delicate specimens for high-resolution DIC. Methods: The technique consists in a well-controlled nebulized micro-mist, containing predominantly no more than one nanoparticle per mist droplet. The micro-mist is subsequently dried, resulting in a flow of individual nanoparticles that are deposited on the specimen surface at near-room temperature. By having single nanoparticles falling on the specimen surface, the notoriously challenging task of controlling nanoparticle-nanoparticle and nanoparticle-surface interactions as a result of the complex droplet drying dynamics, e.g., in drop-casting, is circumvented. Results: High-quality patterns are demonstrated for a number of challenging cases of physically and chemically sensitive specimens with nanoparticles from 1 μm down to 50 nm in diameter. It is shown that the pattern can easily be scaled within (and probably beyond) this range, which is of special interest for micromechanical testing using in-situ microscopic imaging techniques, such as high-magnification optical microscopy, optical profilometry, atomic force microscopy, and scanning electron microscopy, etc. Conclusions: Delicate specimens can conveniently be patterned at near-room temperature ($\sim $ ∼ 37 ∘C), without exposure to chemicals, physical contact or vacuum, while the pattern density and speckle size can be easily tuned.

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Section: Freestanding Highly Stretchable Mems Specimen: (Topographical Pattern On An Extremely Physically Delicate Specimen)mentioning

confidence: 99%

Cool, Dry, Nano-scale DIC Patterning of Delicate, Heterogeneous, Non-planar Specimens by Micro-mist Nebulization

Shafqat

2021

Exp Mech

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“…So far, two major approaches have been commonly utilised to realise stretchable systems: (1) a fully stretchable system, which involves the fabrication of the devices that are intrinsically stretchable and deform in response to mechanical strain; and (2) a semi-stretchable system, which involves the usage of stretchable interconnects to connect the rigid islands of silicon or inorganic semiconductor-based devices (Figure 1.1) [27][28][29][30][31][32]. These are discussed in detail in Section 2.…”

Section: Introductionmentioning

confidence: 99%

“…Reproduced from [27]. The overall stretchability of the circuit is mainly determined by the free-standing interconnects.…”

Section: Introductionmentioning

confidence: 99%

“…The semi-stretchable systems introduce stretchability through an islandbridge configuration that contains high-performance inorganic electronic devices as rigid islands and stretchable interconnects as bridges [36][37][38][39][40][41]. Unlike a fully stretchable system, in which intrinsically stretchable devices accommodate the stretching deformation, the applied stress on the semistretchable system is concentrated on the stretchable interconnect itself (Figures 1.1c and 1.1d) [27,28]. Therefore, it is essential to develop reliable stretchable conductors that meet the stretching requirements.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1.1 Cont.interconnected by (e.g., horseshoe-shaped) free-standing metal interconnects.Reproduced from[27]. The overall stretchability of the circuit is mainly determined by the free-standing interconnects.…”

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confidence: 99%

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Stretchable Systems

Kumaresan

Yogeswaran

Occhipinti

et al. 2021

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Stretchable electronics is one of the transformative pillars of future flexible electronics. As a result, the research on new passive and active materials, novel designs, and engineering approaches has attracted significant interest. Recent studies have highlighted the importance of new approaches that enable the integration of high-performance materials, including, organic and inorganic compounds, carbon-based and layered materials, and composites to serve as conductors, semiconductors or insulators, with the ability to accommodate electronics on stretchable substrates. This Element presents a discussion about the strategies that have been developed for obtaining stretchable systems, with a focus on various stretchable geometries to achieve strain invariant electrical response, and summarises the recent advances in terms of material research, various integration techniques of high-performance electronics. In addition, some of the applications, challenges and opportunities associated with the development of stretchable electronics are discussed.

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Omnidirectional stretchability of freestanding interconnects for stretchable electronics

Shafqat¹,

Geers²,

Hoefnagels³

2020

Smart Mater. Struct.

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Advanced stretchable electronics applications, such as health monitoring patches, high-density curvilinear detectors etc, not only require the interconnects in these devices to accommodate large uniaxial strains vvvvbut they should also be able to withstand complex multiaxial loading such as in-plane and out-of-plane shear loading for reliable and optimal device operation. However, only uniaxial stretchability of these stretchable interconnects is typically characterised and reported in the literature. Here, we compare three relatively similar and relatively simple freestanding interconnect geometries on the basis of their multiaxial stretchability to evaluate their feasibility for typical stretchable electronics applications. The three geometries include: (1) the (traditional) serpentine structure, that has been studied most extensively in the literature (2) the rotation out-ofplane elongation (ROPE) interconnect, designed to exploit buckling and out-of-plane rotation to enhance stretchability (Shafqat et al 2017 Micromachines 8 277) and the (3) the non-buckling inplane elongation (IPE) interconnect, designed to fit a maximum number of beam members within the footprint area. To evaluate the multiaxial stretchability of the three designs finite element (FE) simulations were performed by loading the interconnects in the xy-, yz-and xz-planes under a range of loading angles. Furthermore, multiaxial loading experiments were performed on the ROPE interconnect samples by loading the samples in uniaxial in-plane stretching, in-plane shear and out-of-plane shear loading cases and compared with the FE simulations.

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A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

Cited by 3 publications

References 30 publications

Cool, Dry, Nano-scale DIC Patterning of Delicate, Heterogeneous, Non-planar Specimens by Micro-mist Nebulization

Cool, Dry, Nano-scale DIC Patterning of Delicate, Heterogeneous, Non-planar Specimens by Micro-mist Nebulization

Stretchable Systems

Omnidirectional stretchability of freestanding interconnects for stretchable electronics

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