A Planar Integrated Micro-mass Spectrometer

Müller, Jörg; G, Quiring; Reinhardt-Szyba, Maria; Wong, R.M. Ramírez; Wehrs, Henning

doi:10.1007/978-1-4614-3828-1_14

Cited by 3 publications

(4 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This limits the application of mass spectrometry systems in different areas due to environmental, physical and cost constraints. Therefore, miniaturization is one of the main topics of research in modern mass spectrometry [2,21].…”

Section: Mass Spectrometersmentioning

confidence: 99%

“…There are several groups working on μMS [2,21,22] and some have already commercially available systems, for example the Microsaic Systems Ltd in London. One of the most interesting prototypes, denominated PIMMS (Planar Integrated Micro Mass Spectrometer), is currently under development in the Microsystem Technology laboratory at the Hamburg University of Technology (TUHH).…”

Section: Micro Mass Spectrometers (μMs)mentioning

confidence: 99%

See 1 more Smart Citation

High sensitivity field asymmetric ion mobility spectrometer

Chavarria

Matheoud

Marmillod

et al. 2017

Review of Scientific Instruments

View full text Add to dashboard Cite

A high sensitivity field asymmetric ion mobility spectrometer (FAIMS) was designed, fabricated, and tested. The main components of the system are a 10.6 eV UV photoionization source, an ion filter driven by a high voltage/high frequency n-MOS inverter circuit, and a low noise ion detector. The ion filter electronics are capable to generate square waveforms with peak-to-peak voltages up to 1000 V at frequencies up to 1 MHz with adjustable duty cycles. The ion detector current amplifier has a gain up to 10 V/A with an effective equivalent input noise level down to about 1 fA/Hz during operation with the ion filter at the maximum voltage and frequency. The FAIMS system was characterized by detecting different standard chemical compounds. Additionally, we investigated the use of a synchronous modulation/demodulation technique to improve the signal-to-noise ratio in FAIMS measurements. In particular, we implemented the modulation of the compensation voltage with the synchronous demodulation of the ion current. The analysis of the measurements at low concentration levels led to an extrapolated limit of detection for acetone of 10 ppt with an averaging time of 1 s.

show abstract

Section: Mass Spectrometersmentioning

confidence: 99%

Section: Micro Mass Spectrometers (μMs)mentioning

confidence: 99%

High sensitivity field asymmetric ion mobility spectrometer

Chavarria

Matheoud

Marmillod

et al. 2017

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

“…[10][11][12][13] To sustain stable glow-discharge plasma, the pressure of the microplasma source was approximately 100 Pa. To maintain the gas pressure of microplasma, the microplasma sources, which were used as ionization sources of MMS, were the three-dimensional confined (TDC) sources.…”

Section: -2mentioning

confidence: 99%

“…An example is a microplasma that is used as an ionization source for a micro mass spectrometer (MMS). 10 Hauschild et al reported that an MMS with a microwave-induced microplasma as an electron source instead of filaments increased the electron source lifetime. 11,12 In this case, the gas pressure required to separate a Email yxhh@ecust.edu.cn 2158-3226/2016/6(4)/045016/20 6, 045016-1 © Author(s) 2016.…”

Section: Introductionmentioning

confidence: 99%

Electron and ion kinetics in three-dimensional confined microwave-induced microplasmas at low gas pressures

Tang

Wang

et al. 2016

AIP Advances

View full text Add to dashboard Cite

The effects of the gas pressure (pg), microcavity height (t), Au vapor addition, and microwave frequency on the properties of three-dimensional confined microwave-induced microplasmas were discussed in light of simulation results of a glow microdischarge in a three-dimensional microcavity (diameter dh = 1000 μm) driven at constant voltage loading on the drive electrode (Vrf) of 180 V. The simulation was performed using the PIC/MCC method, whose results were experimentally verified. In all the cases we investigated in this study, the microplasmas were in the γ-mode. When pg increased, the maximum electron (ne) or ion density (nAr+) distributions turned narrow and close to the discharge gap due to the decrease in the mean free path of the secondary electron emission (SEE) electrons (λSEE-e). The peak ne and nAr+ were not a monotonic function of pg, resulting from the two conflicting effects of pg on ne and nAr+. The impact of ions on the electrode was enhanced when pg increased. This was determined after comparing the results of ion energy distribution function (IEDFs) at various pg. The effects of t on the peaks and distributions of ne and nAr+ were negligible in the range of t from 1.0 to 3.0 mm. The minimum t of 0.6 mm for a steady glow discharge was predicted for pg of 800 Pa and Vrf of 180 V. The Au vapor addition increased the peaks of ne and nAr+, due to the lower ionization voltage of Au atom. The acceleration of ions in the sheaths was intensified with the addition of Au vapor because of the increased potential difference in the sheath at the drive electrode.

show abstract

Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures

Tang

Wang

et al. 2016

IEEE Trans. Plasma Sci.

View full text Add to dashboard Cite

A Planar Integrated Micro-mass Spectrometer

Cited by 3 publications

References 16 publications

High sensitivity field asymmetric ion mobility spectrometer

High sensitivity field asymmetric ion mobility spectrometer

Electron and ion kinetics in three-dimensional confined microwave-induced microplasmas at low gas pressures

Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures

Contact Info

Product

Resources

About