A planar capacitive micro positioning sensor

Furuichi, Hajime; Fearing, Ronald S.

doi:10.1109/mhs.1996.563406

Cited by 6 publications

(2 citation statements)

References 9 publications

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“…They require nearly zero power for operation and are thermally stable [1]. In sensing applications, capacitive microsensors have been designed and used for accelerometers [2], gyroscopes [3], pressure measurement [4], proximity detection [5, 6], and linear or rotary position monitoring [7], among others. The growing demand on low‐cost microsensor systems has led to the development of generic capacitive interface circuits with flexible operating parameters that can be paired with capacitive sensors [8, 9].…”

Section: Introductionmentioning

confidence: 99%

Low‐power, parasitic‐insensitive interface circuit for capacitive microsensors

Aezinia

Bahreyni

2016

IET Circuits, Devices & Systems

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Capacitive transduction is ubiquitously employed at macro-and especially micro-scales due to their simple structure and stability. This study proposes a topology for a low-power readout circuit for differential capacitive sensors. The circuit includes two switched-capacitor blocks that produce signals that are proportional to the difference and sum of the sense capacitors. Outputs of these two blocks are fed to an analogue divider to produce a pulse whose width is proportional to the ratio of the difference to sum of the sense capacitors. In addition to providing adjustable sensitivity and noise levels, this also reduces the sensitivity of the sensor to common-mode parasitics at the circuit input. The circuit topology was realised in a standard CMOS 0.35 µm technology with a total chip area of 330 µm × 600 µm. The performance of the fabricated circuit was evaluated by pairing it with a micromechanical variable capacitor. Experimental results demonstrated the capability of the circuit to resolve 160 aF of differential capacitance with a total power consumption of 720 µW while remaining insensitive to common-mode parasitic capacitances.

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Section: Introductionmentioning

confidence: 99%

Low‐power, parasitic‐insensitive interface circuit for capacitive microsensors

Aezinia

Bahreyni

2016

IET Circuits, Devices & Systems

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“…Zhu [3] had designed one with predicted resolution of 0.1um. A capacitive incremental position measurement system by [4] was used to detect the required position for controlling two-dimensional planar motor on an air bearing. Hartwell [5] and Kuijpers [6] also developed a planar CS for micro-positioning or MEMS with resolution up to nano-order.…”

Section: Introductionmentioning

confidence: 99%

A Planar Capacitive Sensor for Large Scale Measurement

Wen

Chen

2008

KEM

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A planar capacitive sensor (PCS) is proposed for X and Y directions measurement. One axial displacement can be measured without the coupling of another axial movement. Two groups electrodes with 90 degree out-of-phase, forming triangle sine and triangle cosine wave, can be applied for direction detection and interpolation, aiming at high resolution. Simulation results show that proposed PCS is available for planar measurement.

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