A piezoelectric inchworm actuator of linear type using symmetrical lever amplification

Ma, Li; Xiao, Jintao; Zhou, Shasha; Sun, Lining

doi:10.1177/1740349914531567

Cited by 16 publications

(12 citation statements)

References 11 publications

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“…According to different working principles, quasi-static piezoelectric motors can be divided into inchworm type and inertial impact type. Ma et al [5] proposed an inchworm piezoelectric motor designed with a symmetrical lever displacement amplifier. The resolution was 60 nm, and the highest speed was only 1.259 mm s −1 .…”

Section: Introductionmentioning

confidence: 99%

Development of a high-resolution, high-speed impact piezoelectric actuator using cross-frequency band method

Li¹,

Li²,

Mingfei³

et al. 2022

Smart Mater. Struct.

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A novel impact piezoelectric actuator is proposed in this paper to achieve cross-scale driving, which can realise high resolution and high speed. The piezoelectric actuator is mainly composed of four diamond-shaped flexible hinges, which can consider a certain stiffness and flexibility. The operating principle of the piezoelectric actuator is introduced. The actuator is excited by two sinusoidal waves with a frequency ratio of 1:2 to achieve impact drive at quasi static state. The appropriate structural parameters are obtained by simulation. The actuator is designed to make the frequency ratio of first and second vibration modes 1:2, which can achieve impact drive at resonant state. The prototype is fabricated, and the characteristics are tested. The measured resonant frequency ratio is consistent with the simulated value. Experimental results show that when the prototype works at quasi-static state, the resolution is 37 nm with driving voltages of 12 Vp-p; at resonant state, the no-load maximum speed is 125.43 mm/s and the maximum load is 0.5 N when the driving frequency and voltages are 1.95 kHz, 40 Vp-p and 3.90 kHz, 160 Vp-p, respectively. The proposed actuator can be used for precision positioning and can improve the accuracy and the efficiency of processing instruments.

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Section: Introductionmentioning

confidence: 99%

Development of a high-resolution, high-speed impact piezoelectric actuator using cross-frequency band method

Li¹,

Li²,

Mingfei³

et al. 2022

Smart Mater. Struct.

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“…19,20 Ma et al designed a new piezoelectric linear actuator with a symmetrical lever-type displacement amplifying mechanism based on a uniaxial double-slot right circular flexible hinge. 21 It can achieve a large displacement for the driving part and sufficient clamping force for the clamping part. Jung and Kim designed a piezoelectric actuated platform which was composed of a multi-levers amplifying mechanism and had a magnification of more than 60 times.…”

Section: Introductionmentioning

confidence: 99%

Optimization design of compliant focusing mechanism for space optical camera with light weight

Liu

et al. 2022

Advances in Mechanical Engineering

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Thermal radiation and vacuum lead to the deformation of bearing cylinder with carbon fiber composites which generates the defocus phenomenon for space optical camera. As heavier weight and higher complexity of the rigid focusing mechanism for the space optical camera, a novel compliant focusing mechanism with lighter weight and simple structure was designed and tested in this paper. In order to achieve stroke range and ensure image quality for the compliant focusing mechanism, micro driving displacement from the piezoelectric ceramics was amplified by two-stage flexible hinge lever-type mechanism. Taking the size parameters of the flexure hinges and beams as the design variables, an optimization model of the compliant focusing mechanism was established in which minimizing weight was considered as objection function under the stroke requirements. Consequently, optimal structure parameters of the compliant focusing mechanisms under different input forces can be obtained under the allowable stress and lighter weight. The effectiveness of the proposed compliant focusing mechanism was verified by the simulations and experiments. The results show that the compliant focusing mechanism can achieve a stroke of 2 mm for the focal plane assembly. The proposed method provided a new idea to design the focusing mechanism with lighter weight, simpler structure and higher reliability.

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“…The required tolerance between the frame and channel is determined by the working stroke of the clamp actuators and the blocking force required on the channel. Mechanical amplification can be built into the frame that increases the clamp stroke from the actuator stroke, but would reduce the force exerted on the channel [4,14]. When minimizing the footprint of the design, the tolerance is decreased with the reduction of the length of the clamp actuators.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric inchworm actuator using silicon as the mechanical material

Hughes¹,

Adams²

2021

Eng. Res. Express

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Piezoelectric inchworm actuators allow for a large stroke and high precision. This paper aims to minimize the footprint of the actuator by using semiconductor and MEMS fabrication techniques to build the frame and channel out of silicon wafers. The high precision of the semiconductor processes allows for precise tolerances as well as the ability to use batch processing for a shorter fabrication time. Using silicon as the mechanical material can also allow for the incorporation of the electrical signals into the frame.

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A piezoelectric inchworm actuator of linear type using symmetrical lever amplification

Cited by 16 publications

References 11 publications

Development of a high-resolution, high-speed impact piezoelectric actuator using cross-frequency band method

Development of a high-resolution, high-speed impact piezoelectric actuator using cross-frequency band method

Optimization design of compliant focusing mechanism for space optical camera with light weight

Piezoelectric inchworm actuator using silicon as the mechanical material

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