Development of a high-resolution, high-speed impact piezoelectric actuator using cross-frequency band method

Abstract

A novel impact piezoelectric actuator is proposed in this paper to achieve cross-scale driving, which can realise high resolution and high speed. The piezoelectric actuator is mainly composed of four diamond-shaped flexible hinges, which can consider a certain stiffness and flexibility. The operating principle of the piezoelectric actuator is introduced. The actuator is excited by two sinusoidal waves with a frequency ratio of 1:2 to achieve impact drive at quasi static state. The appropriate structural parameters are obtained by simulation. The actuator is designed to make the frequency ratio of first and second vibration modes 1:2, which can achieve impact drive at resonant state. The prototype is fabricated, and the characteristics are tested. The measured resonant frequency ratio is consistent with the simulated value. Experimental results show that when the prototype works at quasi-static state, the resolution is 37 nm with driving voltages of 12 Vp-p; at resonant state, the no-load maximum speed is 125.43 mm/s and the maximum load is 0.5 N when the driving frequency and voltages are 1.95 kHz, 40 Vp-p and 3.90 kHz, 160 Vp-p, respectively. The proposed actuator can be used for precision positioning and can improve the accuracy and the efficiency of processing instruments.

Research on variable stiffness asymmetrical resonant linear piezoelectric actuator based on multi-modal drive

“…The motor of Hu et al [35] uses two driving vibrators to realize bidirectional motor movement, which will lead to a more complex motor structure and control circuit. The motor of Li et al [19] is driven by a resonant mechanical approximate sawtooth wave. This synthesis of such signals is difficult, and multichannel harmonic signals are usually required for synthesis.…”

“…When the excitation signal voltage is 240 V p-p , the frequency and speed characteristic curves of the motor are measured, as shown in figure 16. When the excitation signal Motor of Shen et al [33] Motor of Hu et al [35] Motor of Li et al [19] Motor in this paper frequency is 601 Hz, the motor is in the best working condition. At this time, the maximum reverse speed of the motor prototype reaches 13.126 mm s −1 .…”

“…Piezoelectric motors have a variety of structures, but the mainstream of the academic circle divides them into inchworm piezoelectric motors [10][11][12], ultrasonic piezoelectric motors [13,14], and inertial impact piezoelectric motors [15][16][17][18][19]. The inertia impact piezoelectric motor uses the inertia impact of the stator vibration to generate micro displacement to realize the linear motion or rotation of the mover [20,21].…”

A compact, friction self-matching, non-inertial piezo motor with scanning capability

“…Unlike inertial PMs, non-inertial PMs are driven by the static friction acting on a slider by several piezo actuators. The latter shows higher positioning accuracy, which is crucial for the practical application of PMs [12][13][14][15], but unfortunately, noninertial devices suffer from structural complexity and the need to match friction in various places.…”

Bipedal driven inertial type piezoelectric motor working under quasi-static and resonant states

“…Li et al [26] designed an impact piezoelectric motor with four diamond-shaped flexible hinges, achieving a speed of 125.43 mm s −1 in resonant state and a minimum resolution of 37 µm in quasi-static state. Pan et al [27] designed a new piezoelectric motor based on inertial mechanism that can work in both quasi-static and resonant states, achieving a maximum speed of 26.1 mm s −1 and a minimum resolution of 0.67 µm.…”