A piezoelectric bimorph micro-gripper with micro-force sensing

Huang, Xinhan; Cai, Jun; Wang, Min; Lv, Xiadong

doi:10.1109/icia.2005.1635071

Cited by 16 publications

(4 citation statements)

References 2 publications

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“…The tweezer thickness is only dependent on the thickness of the photoresist mold which can be controlled by varying the photoresist and spin recipe. Since the tweezers are composed of a rectangular beam structure, the strength and mechanics of the tip motion can be modeled using beam theory [11,16,19,20,27,31,35,40].…”

Section: Designmentioning

confidence: 99%

“…The last consideration is the delivery of actuation mechanisms. Several microtweezers in the literature require the use of electrostatic force [7,[14][15][16][17][18][19][20][21][22], electrothermal force [8,12,13,[24][25][26][27][28][29], electromagnetic force [1-4, 30, 31], laser light [32], piezoelectric effect [6,[33][34][35][36] or shape memory alloy [9,[37][38][39]. These actuation mechanisms complicate the fabrication of microtweezers and consequently limit the design, size and variability of the tools that can be produced.…”

Section: Introductionmentioning

confidence: 99%

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Mechanically driven microtweezers with integrated microelectrodes

Choi

Ross

Wester

et al. 2008

J. Micromech. Microeng.

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This paper presents a method for fabricating a fundamental MEMS tool-microtweezers. Microtweezers offer an attractive option to meet the increasing need to grasp, manipulate and excise microstructures or biological components. The microtweezers presented here augment a standard micromanipulator, allowing precise positioning in three dimensions. An additional micro-drive control knob, which is affixed to the micromanipulator, allows actuation of the tweezer tips through the use of a tether-cable drive system. This drive actuates the tweezer tips by the reciprocating motion of two microfabricated parts: the tweezers and tweezer box. A simple three-layer planar fabrication scheme allows for a broad range of tweezer styles (straight and serrated tips) and sizes (microns to millimeters). For these studies, 20 µm wide and 10 µm thick nickel beams were developed for the tweezer tips, which could endure 20 mN of force. To demonstrate the concept of microassembly, pick and place operations were performed on 10 µm thick film structures. Additional functionality was achieved by integrating platinum-black microelectrodes into parylene-coated tweezers to allow electrophysiological functions such as cellular stimulation and recording. Ultimately, this unique and simple design affords extraordinarily delicate control that is potentially beneficial for applications in microassembly, electrophysiology and microsurgery.

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Section: Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Mechanically driven microtweezers with integrated microelectrodes

Choi

Ross

Wester

et al. 2008

J. Micromech. Microeng.

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“…Liu et al [13] used piezoelectric bimorphs to design a novel in-pipe micro-robot where deflections of the piezoelectric bimorphs are converted into translational locomotion by the impact-driven mechanism. Huang et al [14] used two piezoelectric bimorphs to put forward a new micro-gripper on the basis of a dual cantilever structure, realizing micro-assembly tasks. Amr et al [11] investigated the dynamic characteristics of bending piezoelectric bimorph actuators theoretically and experimentally and developed a parallel micro-gripper.…”

Section: Introductionmentioning

confidence: 99%

Study on a new type of miniature piezo walking robot

Peng¹,

Liu²,

Zheng³

2021

Smart Mater. Struct.

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The development of a small-scale piezoelectric-driven walking robot is presented in this paper. Eight pieces of piezoelectric bimorph actuators are employed in the proposed design to achieve a direct drive. The displacement amplification mechanism of the robot is not required to minimize the weight and complexity. This robot is composed of four inner legs and four outer legs with a slop to the ground. Two square wave signals with a phase difference of 180° are used to realize bidirectional motion. First, the constitutive equation of piezoelectric bimorph with elastic support layer under external voltage and force is deduced. Then, the robot gait cycle is described, and the velocity expression of the robot is established using the kinematic analysis to predict the robot’s motion. Afterward, a prototype is fabricated on the basis of the proposed design. Finally, an experimental test is conducted for characterizing the walking robot. The design methodology can be applied to the development of the other piezoelectric robot for bidirectional motion.

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“…A variety of MEMS actuation methods have been described in the literature including electrostatic, piezoelectric, electro-thermal and the use of shape memory alloys [8][9][10][11][12][13][14]. Electro-thermal micro-grippers have the advantage over other devices of acceptably low actuating voltages and careful material selection can allow the temperature increases to be small enough to avoid damage to biological samples.…”

Section: Introductionmentioning

confidence: 99%

Polymer micro-grippers with an integrated force sensor for biological manipulation

Mackay

Clark

et al. 2012

J. Micromech. Microeng.

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The development of a novel system integrating SU-8 micro-grippers with a tensile force sensor for handling and characterising the mechanical properties of delicate biological samples, such as fibrils, is presented. The micro-grippers are actuated by the electro-thermal effect and have gripping forces comparable to the common "hot-and-cold-arm" grippers. A thorough and robust finite element model was developed for design optimisation and validated experimentally. A new micro-mechanical calibration method using a piezoelectric manipulator with a force measurement system was successfully applied to test the structure.

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A piezoelectric bimorph micro-gripper with micro-force sensing

Cited by 16 publications

References 2 publications

Mechanically driven microtweezers with integrated microelectrodes

Mechanically driven microtweezers with integrated microelectrodes

Study on a new type of miniature piezo walking robot

Polymer micro-grippers with an integrated force sensor for biological manipulation

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