1991
DOI: 10.1016/0168-583x(91)95564-t
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A particularly fast TRIM version for ion backscattering and high energy ion implantation

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Cited by 102 publications
(42 citation statements)
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“…The most developed model of interaction is used in the widely known code TRIM [16], but its efficiency is not sufficient for simulation of backscattering. Biersack et al [24] found a possibility to increase the efficiency of this code up to an appropriate level without a significant loss of accuracy of the description. Figure 7(a) shows their results [25] for scattering of 100-keV protons from a 1000-Å-thick gold foil, together with the results of simulations done with the shower approach.…”
Section: Program Tests and Applicationsmentioning
confidence: 99%
“…The most developed model of interaction is used in the widely known code TRIM [16], but its efficiency is not sufficient for simulation of backscattering. Biersack et al [24] found a possibility to increase the efficiency of this code up to an appropriate level without a significant loss of accuracy of the description. Figure 7(a) shows their results [25] for scattering of 100-keV protons from a 1000-Å-thick gold foil, together with the results of simulations done with the shower approach.…”
Section: Program Tests and Applicationsmentioning
confidence: 99%
“…22 A precise description of the simulations is given by de Ridder et al 23 The obtained barium depth distribution for the LEIS spectra presented in Fig. 5 is shown in Fig.…”
Section: Comparison Between High and Low Metal Deposition Ratesmentioning
confidence: 99%
“…Because of the influence of multiple scattering at low energies, the ratios of the experimental 6 spectra in an energy interval close to the kinematic onset [25] were compared to the results from corresponding Monte Carlo simulations (TRBS, [26]). In the simulations, the ZBL potential [27] was used, and Au was set to match the experimental value (SCS data from [14]), leaving X as the only parameter, which was optimized until convergence was reached;…”
Section: At High Ion Velocities V >> Vf (Vf Denotes the Fermi Velocitmentioning
confidence: 99%