A numerical simulation on a pneumatic air table realized by micro-EDM

Hirata, Toru; Guénat, O.; Akashi, Tomoyuki; Grétillat, M.-A.; Rooij, N. F. de

doi:10.1109/84.809068

Cited by 4 publications

(4 citation statements)

References 10 publications

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“…13 is made up of a miniaturized one-dimensional pneumatic actuator realized by microelectron discharge machining (EDM) and other more standard silicon and glass micromachining techniques. In parallel, some numerical simulations were conducted, which upheld the experimental results as well [33]. While conventional pneumatic actuators rely on transport by friction, this system employs the dynamic pressure of inclined driving jet, which allows significant enhancement in the horizontal transport distance achievable.…”

Section: Micro-transportation Systems For Particle-free Environmentmentioning

confidence: 94%

<title>Microsystems for diverse applications using recently developed microfabrication techniques</title>

et al. 2000

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The continuous progress in micro and nano-system technologies has allowed the successful development of many innovative products in process control, environmental monitoring, healthcare, automotive and aerospace as well as information processing systems. In this paper on overview will be given of current progress in micro-and nanofabrication process technologies, such as deep reactive ion etching, micro-electro discharge machining, thick photoresist processing and plating. The availability of these micro-and nanofabrication processes will be illustrated with examples of new generations of silicon-based sensors, actuators and Microsystems with a particular emphasis on real applications of these components and systems.

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Section: Micro-transportation Systems For Particle-free Environmentmentioning

confidence: 94%

<title>Microsystems for diverse applications using recently developed microfabrication techniques</title>

et al. 2000

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“…In 1998, Hirata et al [52,53] designed a one-dimensional micro-conveyor. The fabrication combines microelectrodischarge machining and wet-etching.…”

Section: Tilted Air-jet Manipulatorsmentioning

confidence: 99%

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

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Many manipulation systems using air flow have been proposed for object handling in a non-prehensile way and without solid-to-solid contact. Potential applications include high-speed transport of fragile and clean products and high-resolution positioning of thin delicate objects. This paper discusses a comprehensive survey of state-of-the-art pneumatic manipulation from the macro scale to the micro scale. The working principles and actuation methods of previously developed air-bearing surfaces, ultra-sonic bearing surfaces, air-flow manipulators, air-film manipulators, and tilted air-jet manipulators are reviewed with a particular emphasis on the modeling and the control issues. The performance of the previously developed devices are compared quantitatively and open problems in pneumatic manipulation are discussed.

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“…The mechanism of discharge presumed according to the result of production has been analyzed [2][3][4]. Behavior of powders was observed in detail to analyze how the debris in the gap affect discharge occurrence [5,6].…”

Section: Introductionmentioning

confidence: 99%

Simulation of Particles Movement in Powder Mixed EDM

Wang

2010

AMR

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The particles dispersed in gap can increase the discharge stability and reduce discharge energy density in powder mixed EDM, which effectively improve the surface quality of machined workpieces. Concentration and distribution of particles computed by finite element methods in working conditions were simulated and corresponding experiments were done. The activities of particles in the discharge process were analyzed by experiments and theories. The results show particles have group effect in the gap and that the effect closely associates with particles concentration.

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A numerical simulation on a pneumatic air table realized by micro-EDM

Cited by 4 publications

References 10 publications

<title>Microsystems for diverse applications using recently developed microfabrication techniques</title>

<title>Microsystems for diverse applications using recently developed microfabrication techniques</title>

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Simulation of Particles Movement in Powder Mixed EDM

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