2017
DOI: 10.1109/jlt.2016.2614542
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A Novel White Light Interference Based AFM Head

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Cited by 25 publications
(8 citation statements)
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“…Fiber optics are used in applications that require high precision and electromagnetic-interference immunity [116]. The principle underlying fiber optics is based on white-light interference [117], which can relate the absolute shifting of a signal emitted from a light source with any physical variable [118]. This type of sensor is used to measure deformation, temperature, material concentrations, acceleration, rotation, pressure, vibrations, and shifting.…”
Section: Fiber Opticsmentioning
confidence: 99%
“…Fiber optics are used in applications that require high precision and electromagnetic-interference immunity [116]. The principle underlying fiber optics is based on white-light interference [117], which can relate the absolute shifting of a signal emitted from a light source with any physical variable [118]. This type of sensor is used to measure deformation, temperature, material concentrations, acceleration, rotation, pressure, vibrations, and shifting.…”
Section: Fiber Opticsmentioning
confidence: 99%
“…The plunge cutting experiments generated five taper grooves on the 6H-SiC sample. The taper grooves were measured by a white light interferometer [ 52 ], and their surface morphologies were shown in Figure 11 . For each groove, the morphologies in the ductile-cut region and the brittle-cut region are significantly different from each other.…”
Section: Examination Of the Theory On 6h-sicmentioning
confidence: 99%
“…Extensive research has been conducted on developing various measurement instruments to fulfill a wide range of metrological needs [ 7 , 8 , 9 , 10 ], such as high precision coordinate measuring machines [ 7 , 8 ], micro topographical instruments [ 11 ], electron microscopy [ 12 ], optical interferometry [ 13 , 14 , 15 ], etc. Although these instruments are capable of performing accurate and efficient measurement at specific measurement range, few of them could realize high dynamic range multi-scale measurement with high efficiency and accuracy.…”
Section: Introductionmentioning
confidence: 99%