RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics 2013
DOI: 10.1109/rsm.2013.6706472
|View full text |Cite
|
Sign up to set email alerts
|

A novel tunable water-based RF MEMS solenoid inductor

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
4
0

Year Published

2015
2015
2024
2024

Publication Types

Select...
6
2
1

Relationship

2
7

Authors

Journals

citations
Cited by 11 publications
(4 citation statements)
references
References 25 publications
0
4
0
Order By: Relevance
“…In Table 2, the performance of the proposed TBIs are com- pared with others [13][14][15][20][21][22][23][24][25][26][27] in terms of primary inductance, size, tuning range, Q-factor, and action voltage. Due to the narrow tuning range characteristics below 233 and the need for voltage above 7 V or special operating signals, the tunable inductors [14,15,[20][21][22][23][24][25][26] using MEMS actuators have limitations for general product applications. In Park et al [13], a multi-layer stacked inductor switched by MOSFETs is reported.…”
Section: Fabrication and Measurement Resultsmentioning
confidence: 99%
“…In Table 2, the performance of the proposed TBIs are com- pared with others [13][14][15][20][21][22][23][24][25][26][27] in terms of primary inductance, size, tuning range, Q-factor, and action voltage. Due to the narrow tuning range characteristics below 233 and the need for voltage above 7 V or special operating signals, the tunable inductors [14,15,[20][21][22][23][24][25][26] using MEMS actuators have limitations for general product applications. In Park et al [13], a multi-layer stacked inductor switched by MOSFETs is reported.…”
Section: Fabrication and Measurement Resultsmentioning
confidence: 99%
“…The primary drawback of this design, though, is that it is not as common in power electronic applications because of the low inductance values that can be acquired with it, making it impractical for high-power applications. However, this approach could be promising in the future as a result of advancements in MEMS technology [84]. All of the techniques that have been covered thus far fall into the category of current-driven or current-controlled variable inductors, where the inductance value was adjusted online using a DC bias current.…”
Section: Mems-based Configurationsmentioning
confidence: 99%
“…We have focalized our study on the behavior of a 6 turns coil inductor incorporating 3-turns microfluidic channels partially or totally filled with liquids [11][12][13][14].…”
Section: Introductionmentioning
confidence: 99%