A novel surface recovery algorithm in white light interferometry

Lei, Zili; Liu, Xiaojun; Chen, Liangzhou; Lu, Wenlong; Chang, Suping

doi:10.1016/j.measurement.2015.11.019

Cited by 45 publications

(24 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Fringe analysis algorithms are essential for optical interferometric measurements to effectively reconstruct the surface topography. Even though a variety of fringe analysis algorithms have been developed over a wide range of application areas [33,[99][100][101], the performance of an algorithm is affected by many factors [102]. The selection of an appropriate fringe analysis algorithm needs trade-off considerations because the desired measurement accuracy, speed, resolution, and robustness vary depending on the algorithms [103].…”

Section: Theory Of Fringe Analysis Algorithmsmentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

View full text Add to dashboard Cite

Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

show abstract

Section: Theory Of Fringe Analysis Algorithmsmentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

View full text Add to dashboard Cite

show abstract

“…The Hilbert transform (HT) is an alternative method to obtain coherence envelope and phase values from the captured interference signals [ 24 , 25 , 26 ]. This method effectively reduces the computational complexity and allows a faster processing speed for real-time imaging [ 27 ].…”

Section: Introductionmentioning

confidence: 99%

Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Liang

Kang

2021

Micromachines

View full text Add to dashboard Cite

Optical interferometry plays an important role in the topographical surface measurement and characterization in precision/ultra-precision manufacturing. An appropriate surface reconstruction algorithm is essential in obtaining accurate topography information from the digitized interferograms. However, the performance of a surface reconstruction algorithm in interferometric measurements is influenced by environmental disturbances and system noise. This paper presents a comparative analysis of three algorithms commonly used for coherence envelope detection in vertical scanning interferometry, including the centroid method, fast Fourier transform (FFT), and Hilbert transform (HT). Numerical analysis and experimental studies were carried out to evaluate the performance of different envelope detection algorithms in terms of measurement accuracy, speed, and noise resistance. Step height standards were measured using a developed interferometer and the step profiles were reconstructed by different algorithms. The results show that the centroid method has a higher measurement speed than the FFT and HT methods, but it can only provide acceptable measurement accuracy at a low noise level. The FFT and HT methods outperform the centroid method in terms of noise immunity and measurement accuracy. Even if the FFT and HT methods provide similar measurement accuracy, the HT method has a superior measurement speed compared to the FFT method.

show abstract

“…Most of the optical probes couldn’t fulfil the requirement of high accuracy, due to the fact that their measuring accuracy could be easily influenced by the surface or the material of the measured piece, and the pixels of the image processing instrument were also limited. High resolution could be also obtained by confocal sensor [10], quadrant photo detector [11], Fizeau interferometer [12], white light interference [13,14,15] and other complex photoelectric sensing technology in the probe design. However, the assembly of these sensors is costly and the volume of the assembled probes are usually bulky, which is not suitable for the measurement of micro devices.…”

Section: Introductionmentioning

confidence: 99%

Development of a Micro/Nano Probing System Using Double Elastic Mechanisms

Wang

et al. 2018

Sensors

View full text Add to dashboard Cite

To meet the requirement of high precision measurement of coordinate measurement machine system, a compact microprobe has been designed for 3D measurement in this paper. Aiming to reduce the influences of signal coupling during the probing process, the probe has been designed by adopting two elastic mechanisms, in which the horizontal and vertical motions of the probe tip can be separated by differential signals of quadrant photodetectors in each elastic mechanism. A connecting rod has been designed to transfer the displacement of the probe tip in vertical direction from lower to upper elastic mechanisms. The sensitivity models in horizontal and vertical directions have been established, and the sensor sensitivity has been verified through experiments. Furthermore, the signal coupling of three axes has been analyzed, and mathematical models have been proposed for decoupling. The probing performance has been verified experimentally.

show abstract

A novel surface recovery algorithm in white light interferometry

Cited by 45 publications

References 30 publications

Development of surface reconstruction algorithms for optical interferometric measurement

Development of surface reconstruction algorithms for optical interferometric measurement

Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Development of a Micro/Nano Probing System Using Double Elastic Mechanisms

Contact Info

Product

Resources

About