A novel surface-micromachined capacitive porous silicon humidity sensor

Rittersma, Z. M.; Splinter, Alexandra; Bödecker, André; Benecke, W.

doi:10.1016/s0925-4005(00)00431-7

Cited by 142 publications

(43 citation statements)

References 14 publications

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“…By similarity to the Si nanostructures fabricated electrochemically, 24,25 the formation of pores in our nanostructures may result in good humidity sensing properties, which is of considerable importance in the field of silicon humidity sensors technology. Figure 9 shows the dynamical electrical response to relative humidity (RH%=80%) of different prepared samples.…”

Section: Humidity Sensing Propertymentioning

confidence: 79%

Silicon Nanostructuring Using SF6/O2 Downstram Plasma Etching: Morphological, Optical and Sensing Properties

et al. 2018

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Silicon (Si) nanostructures were prepared in the downstream of radiofrequency SF 6 /O 2 mixture plasma generated in 13.56 MHz hollow cathode discharge system. Depending on the oxygen percentage in the mixture, the obtained Si nanostructures were characterized for their different properties: etching rate, morphology, optical reflectance, photoluminescence, spectral response and humidity sensing. It is found that the etching rate exhibits a maximum value when the O 2 ratio reaches 5%. An interesting defect-induced "violet" luminescence is reported from the Si nanostructures, whose intensity depends on their density. The obtained Si nanostructures have shown to induce a spectral response (SR) enhancement, in comparison with a smooth Si substrate, of about 100 times at 1100 nm wavelength. A very short response time (1 sec) to the humidity was measured for 5% O 2 in the SF 6 /O 2 plasma mixture, which was found to be well-correlated with the porosity of the Si nanostructures.

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Section: Humidity Sensing Propertymentioning

confidence: 79%

Silicon Nanostructuring Using SF6/O2 Downstram Plasma Etching: Morphological, Optical and Sensing Properties

et al. 2018

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“…Many physical properties of porous Si can be harnessed to make a sensor, including capacitance, [6,12] resistance, [13] optical reflectivity, [14,15] and photoluminescence. [16] These various physical phenomena allow detection of toxins, [17,18] volatile organic compounds, [19][20][21][22] polycyclic aromatic hydrocarbons (PAHs), [23] explosives, [24] DNA, [15,25] and proteins, [26][27][28][29][30][31][32] and the ability to chemically modify the porous Si surface [33,34] provides some control over analyte specificity in many of these systems.…”

Section: Molecular Sensors From Porous Simentioning

confidence: 99%

Photoluminescence‐Based Sensing With Porous Silicon Films, Microparticles, and Nanoparticles

Sailor

2009

Adv Funct Materials

150

107

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Here, chemical sensors made from porous Si are reviewed, with an emphasis on systems that harness photoluminescence and related energy‐ and charge‐transfer mechanisms available to porous Si‐derived nanocrystallites. Quenching of luminescence by molecular adsorbates involves the harvesting of energy from a delocalized nanostructure that can be much larger than the molecule being sensed, providing a means to amplify the sensory event. The interaction of chemical species on the surface of porous Si can exert a pronounced influence on this process, and examples of some of the key chemical reactions that modify either the surface or the bulk properties of porous Si are presented. Sensors based on micron‐scale and smaller porous Si particles are also discussed. Miniaturization to this size regime enables new applications, including imaging of cancerous tissues, indirect detection of reactive oxygen species (ROS), and controlled drug release. Examples of environmental and in vivo sensing systems enabled by porous Si are provided.

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“…In contrast, polymer-based humidity sensors have humidity sensitivity for wide moisture conditions. Most of the sensing polymers are either hydrophilic or hydrophobic, which implies that they show considerable structural reform in presence of water [5]. Hence these materials exhibit conductive or dielectric change with environmental humidity which can be quantified for RH monitoring.…”

Section: Introductionmentioning

confidence: 99%

Polyvinyl-Alcohol (Pva)-Based Rf Humidity Sensor in Microwave Frequency

Amin¹,

Karmakar²,

Winther‐Jensen³

2013

PIER B

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Abstract-A highly sensitive, passive relative humidity (RH) sensor using polyvinyl-alcohol (PVA) dielectric film is presented. For the first time, PVA is investigated in microwave RF sensing devices for low cost, high resolution and accurate chipless RH sensor realization. Comparative study with traditional humidity sensing Kapton polymer is presented to validate superior performance of PVA film. Results are presented for two different passive high Q resonators to validate sensing performance in wide applications. Moreover, a new sensing parameter is described to investigate sensitivity measurement through resonance frequency and Q factor variation. The RH sensor has the potential to be integrated with mm and µm-wave high frequency passive RFID for ubiquitous sensing.

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A novel surface-micromachined capacitive porous silicon humidity sensor

Cited by 142 publications

References 14 publications

Silicon Nanostructuring Using SF6/O2 Downstram Plasma Etching: Morphological, Optical and Sensing Properties

Silicon Nanostructuring Using SF6/O2 Downstram Plasma Etching: Morphological, Optical and Sensing Properties

Photoluminescence‐Based Sensing With Porous Silicon Films, Microparticles, and Nanoparticles

Polyvinyl-Alcohol (Pva)-Based Rf Humidity Sensor in Microwave Frequency

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