A novel soi-mems &amp;#x201C;micro-swing&amp;#x201D; time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

Rajaraman, V.; Hau, B.S.; Rocha, Licinio; Dias, Rosana A.; Makinwa, Kofi A. A.; Dekker, R.

doi:10.1109/transducers.2011.5969225

Cited by 1 publication

(1 citation statement)

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“…Rajaraman et al developed a highly sensitive flexible piezoresistive sensor, which can be used to sense vibration with a full scale acceleration range of 2g. 16,17 An acceleration sensor with sensing axis in the plane of a wafer also has been proposed by Partridge et al 18,19 They used a DRIE to form arbitrarily sharp planar flexures with vertical sidewalls. Oblique incidence ion implantation was used to dope the piezoresistors on the sidewalls of the etched structures.…”

Section: Introductionmentioning

confidence: 99%

Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range

Zhang

Takagi

et al. 2014

AIP Advances

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Articles you may be interested inUsing a surface piezoresistor diffusion method and front-side only micromachining process, a planar piezoresistive vibration sensor was successfully developed with a simple structure, lower processing cost and fewer packaging difficulties. The vibration sensor had a large sector proof mass attached to a narrow flexure. Optimization of the boron diffusion piezoresistor placed on the edge of the narrow flexure greatly improved the sensitivity. Planar vibration sensors were fabricated and measured in order to analyze the effects of the sensor dimensions on performance, including the values of flexure width and the included angle of the sector. Sensitivities of fabricated planar sensors of 0.09-0.46 mV/V/g were measured up to a test frequency of 60 Hz. The sensor functioned at low voltages (<3 V) and currents (<1 mA) with a high sensitivity and low drift. At low background noise levels, the sensor had performance comparable to a commercial device. C 2014 Author(s)

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