A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors

Vyshnevsky, O.; Kovalev, S. P.; Wischnewskiy, W.

doi:10.1109/tuffc.2005.1561674

Cited by 98 publications

(57 citation statements)

References 5 publications

(4 reference statements)

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“…The number of the piezoelectric ceramic layers is 15, and the material parameter matrix d is listed in Equation (9). The value of d33 is 230 pC/N from Equation (9). In the ideal situation, the d33 of the multilayer According to the FEA results, the final dimensions are decided to be 30ˆ7.5ˆ3 mm 3 , as mentioned previously.…”

Section: Design and Analysismentioning

confidence: 99%

“…Before making a piezoelectric vibrator, the d33 of the multilayer piezoelectric ceramic used in this study was obtained using the quasi-static d33 meter (ZJ-4NV, Beijing Oriental YUANTONG Science Technology Development Co., Ltd., Beijing, China), and the C0 was measured using the impedance analyzer (4294A, Agilent Technologies Inc., Santa Clara, CA, USA) as shown in Table 1. The number of the piezoelectric ceramic layers is 15, and the material parameter matrix d is listed in Equation (9). The value of d33 is 230 pC/N from Equation (9).…”

Section: Design and Analysismentioning

confidence: 99%

“…The number of the piezoelectric ceramic layers is 15, and the material parameter matrix d is listed in Equation (9). The value of d33 is 230 pC/N from Equation (9). In the ideal situation, the d33 of the multilayer Before making a piezoelectric vibrator, the d 33 of the multilayer piezoelectric ceramic used in this study was obtained using the quasi-static d 33 meter (ZJ-4NV, Beijing Oriental YUANTONG Science Technology Development Co., Ltd., Beijing, China), and the C 0 was measured using the impedance analyzer (4294A, Agilent Technologies Inc., Santa Clara, CA, USA) as shown in Table 1.…”

Section: Design and Analysismentioning

confidence: 99%

“…Ultrasonic linear piezoelectric actuators (ULPAs) [8] working under the composite vibration modes of a piezoelectric ceramic block, such as the first longitudinal and second bending vibration modes, are a research hotspot and many new structures have been proposed [3,9,10]. The structures can be classified into two categories, one of which is the piezoelectric ceramic chip attached to metal as a driving element [7,11], and the other is a single piezoelectric ceramic as a driving element [6,12].…”

Section: Introductionmentioning

confidence: 99%

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Analysis and Experimental Research of a Multilayer Linear Piezoelectric Actuator

et al. 2016

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Abstract:To lower the operating voltage and improve the output performance of piezoelectric actuators, a multilayer monolithic ultrasonic linear piezoelectric actuator was analyzed with the method of finite element analysis (FEA), and a prototype was fabricated and experimentally researched in this study. Experimental results show that the actuator with a multilayer piezoelectric lead zirconate titanate (PZT) structure (size: 30ˆ7.5ˆ3 mm 3 , mass: 5.49 g) can output a pulling force of 5.0 N maximum and a linear velocity up to 270 mm/s at the voltage of 100 V pp (V pp means the peak-to-peak value of the voltage volts), showing a relatively good velocity controllability at the same time. The temperature rise characteristic of the actuator at various voltages was studied. The results indicate that: the temperature of this actuator rises rapidly but tends to saturate at some value; applying an offsetting voltage or decreasing the amplitude of the voltage would reduce the heat production.

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“…The number of the piezoelectric ceramic layers is 15, and the material parameter matrix d is listed in Equation (9). The value of d33 is 230 pC/N from Equation (9). In the ideal situation, the d33 of the multilayer According to the FEA results, the final dimensions are decided to be 30ˆ7.5ˆ3 mm 3 , as mentioned previously.…”

Section: Design and Analysismentioning

confidence: 99%

Section: Design and Analysismentioning

confidence: 99%

“…The number of the piezoelectric ceramic layers is 15, and the material parameter matrix d is listed in Equation (9). The value of d33 is 230 pC/N from Equation (9). In the ideal situation, the d33 of the multilayer Before making a piezoelectric vibrator, the d 33 of the multilayer piezoelectric ceramic used in this study was obtained using the quasi-static d 33 meter (ZJ-4NV, Beijing Oriental YUANTONG Science Technology Development Co., Ltd., Beijing, China), and the C 0 was measured using the impedance analyzer (4294A, Agilent Technologies Inc., Santa Clara, CA, USA) as shown in Table 1.…”

Section: Design and Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Analysis and Experimental Research of a Multilayer Linear Piezoelectric Actuator

et al. 2016

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“…The TWUM produce motion by means of the superposition of standing waves in the stator. A single-mode piezoelectric actuator for ultrasonic linear motors was developed in 2005 [8]. The friction element, as the driving tip, was attached at the midpoint of the long edge of the piezoelectric plate.…”

Section: Introductionmentioning

confidence: 99%

Design of the Piezoelectric Actuator with Double Driving Tips

Chang

Chen

2013

AUSMT

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Abstract:The general operation of a piezoelectric ultrasonic resonant actuator is to convert the cyclic motion of the piezoelectric plate to a linear motion at the rotor or slider. The conventional piezoelectric ultrasonic actuator has only one stator tip to impart both the contact (normal) and driving (tangential) force on the rotor or slider. Since the rotor/slider is driven through friction, the only one stator tip design will result in lower output torques. In theory, a piezoelectric ultrasonic actuator with more stator tips will have larger output torques. However, it is difficult to design a piezoelectric actuator with multiple stator tips with synchronous cyclic motion. In this paper, the design and simulation of a novel piezoelectric actuator with multiple stator tips are presented. The accomplishment of this study is to reduce the motion difference between two different stator tips on the piezoelectric ultrasonic actuator. The Taguchi method was used to find out the optimal dimensions of the piezoelectric plate and the result shows the motion difference between two different stator tips was reduced from 19μm to 0.03μm in the X-direction and from 9μm to 0.18μm in the Y-direction.

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Designing Ordered Structure with Piezoceramic Actuation Units (OSPAU) for Generating Continual Nanostep Motion

Gao

Yang

et al. 2020

Advanced Science

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Continual precision actuations with nanoscale resolution over large ranges have extensive requirements in advanced intelligent manufacturing and precise surgical robots. To produce continual nanostep motion, conventionally, multiple pairs of piezo‐actuators are employed to operate in inchworm principle under complex three‐ or four‐phase timing signal drive. Inspired by the idea of ordered structures with functional units, a much simpler nanostep piezoelectric actuator consisting of (2 × 2) arrayed, cofired multilayer piezoceramic actuation units is developed, which operates in an artificially generated quasi shear mode (AGQSM) that is missing in natural piezoelectric ceramics. Under only one‐phase square‐wave voltage drive, the actuator can produce a stable, continual nanostep motion in two ways at nonresonant frequencies, and the obtained minimum step displacement is as low as 7 nm in open control, indicating its potential application as a precise finger or knife actuator in surgical robots. This work is of great guiding significance for future actuator designs using the methodology of ordered structure with piezoceramic actuation units and AGQSM.

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A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors

Cited by 98 publications

References 5 publications

Analysis and Experimental Research of a Multilayer Linear Piezoelectric Actuator

Analysis and Experimental Research of a Multilayer Linear Piezoelectric Actuator

Design of the Piezoelectric Actuator with Double Driving Tips

Designing Ordered Structure with Piezoceramic Actuation Units (OSPAU) for Generating Continual Nanostep Motion

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