“…Semiconducting metal oxide sensors have been widely studied because of their small dimensions, low cost, and high compatibility with microelectronics. ZnO gas sensors of various forms, such as thick films [17], thin films [18], heterojunctions [19], nanoparticles [20], and nanotubes [21], have all been demonstrated. The oxygen-related gas-sensing mechanism involves the absorption of oxygen molecules on the oxide surface to generate chemisorbed oxygen species (O 2 − , O 2− , O − ) by capturing electrons from the conductance band, making the oxide surface highly resistive.…”