A Novel PZT-Based Traveling-Wave Micromotor With High Performance and Unconstrained Coaxial Rotation

Qin, Feng; Dai, Gang; Sun, Xiangyu; Xu, Qinyin; Du, Yu; Bao, Jingfu

doi:10.1109/jmems.2018.2834541

Cited by 16 publications

(4 citation statements)

References 23 publications

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“…The silicon ring aims to form a flat contact with the stator, while the iron ring is used for preloading and in-situ detection. A detailed structural description has been given in our previous work [16], and the packaged micromotor structures are shown below in figure 1.…”

Section: Structural Design Of the Motormentioning

confidence: 99%

Precise stepping control of a piezoelectric traveling wave micromotor through embedded in-situ detection

Wang¹,

Yang²,

Li³

et al. 2020

J. Micromech. Microeng.

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Piezoelectric actuators are well known for their high precision, and are promising for applications in microrobotics, drug delivery and nanopositioning. However, a piezoelectric traveling wave ultrasonic micromotor is very hard to control due to the frictional drive principle. This work introduces a closed-loop control strategy for a micromotor. An integrating on-chip structure with a piezoelectric stator and sensor alignment is firstly achieved within a 5 × 5 mm2 area, which provides in-situ detection during rotation. With the help of real-time detection and control, a high angular resolution of 0.3° is realized for the micromotor.

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Section: Structural Design Of the Motormentioning

confidence: 99%

Precise stepping control of a piezoelectric traveling wave micromotor through embedded in-situ detection

Wang¹,

Yang²,

Li³

et al. 2020

J. Micromech. Microeng.

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“…PZT thin film was combined with MEMS processes, where no adhesive process is involved. However, the fabrication techniques involved photolithography, etching, sol-gel [ 15 ], and sputtering [ 16 ], representing a complex and time-consuming manufacturing process. Furthermore, the thickness of the thin films was limited in the range of a few hundred nanometers to several micrometers.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

et al. 2021

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This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subsequently, the PZT thick film element was directly printed on the elastic body using the E-Jet printing. This method avoids the glue fabrication process involved in the bulk piezoelectric fabrication, thus avoiding the limits of voltage drops, isolating and absorbing amplitude usually occurred in the vibrator having glue interface. It was observed that B02 and B03 modes were generated at frequencies of 29.74 and 79.14 kHz, respectively, and the amplitudes of B02 and B03 modes were 406 and 176 nm, respectively. The error between the simulation and test result in the B03 modal is only 0.35%, which indicates the accuracy of the simulation analysis and the fabrication process. The PZT thick film traveling-wave micro vibrator successfully realized bidirectional rotation of a rotor, with a maximum speed of 681 rpm, which also shows a linear relationship between excitation voltage and rotary speed. This paper provides an effective method for preparing a micro piezoelectric vibrator for MEMS ultrasonic devices, which simplifies the manufacturing process and enhances the performance of the piezoelectric vibrator.

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“…The SCT has simple structure but complex signal control system. Typical resolution of the SCT is usually at the µm level [13][14][15]. He et al designed a novel, single-phase, harmonic-driven, inertial piezoelectric linear motor using an automatic clamping mechanism, and the minimum resolution of 1.14 µm was achieved [13].…”

Section: Introductionmentioning

confidence: 99%

An inertial piezoelectric rotary actuator characterized by the motion without rollback

Ding

et al. 2020

Smart Mater. Struct.

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Rollback happens to most inertial piezoelectric actuators due to the forward and backward bending of bimorphs in a driving cycle. An inertial piezoelectric rotary actuator with two asymmetrically clamped bimorphs working in phase is proposed in this study to eliminate rollback. The electrical in-phase connection of the two bimorphs gives the actuator two steps in a driving cycle but a reduced load capacity. Comsol software is used for modal analysis and a series of experiments were carried out to study the output performance of the actuator. Experiment results indicated that the actuator can work stably at two steps per cycle without rollback in all working conditions. The minimum angular displacement was 7.4 µrad under the signal of 15 V, 1 Hz without load. With the application of a bias unit, the actuator can drive a 460 g load which is comparable with other inertial piezoelectric actuators. In a word, the in-phase connection of two asymmetrically clamped bimorphs can eliminate rollback, which provides a new idea for the research of precise actuators without rollback.

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A Novel PZT-Based Traveling-Wave Micromotor With High Performance and Unconstrained Coaxial Rotation

Cited by 16 publications

References 23 publications

Precise stepping control of a piezoelectric traveling wave micromotor through embedded in-situ detection

Precise stepping control of a piezoelectric traveling wave micromotor through embedded in-situ detection

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

An inertial piezoelectric rotary actuator characterized by the motion without rollback

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