2000
DOI: 10.1109/55.843159
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A novel photodetector using MOS tunneling structures

Abstract: A metal/oxide/p-Si structure with the ultrathin oxide is utilized as a photodetector. At positive gate bias, the dark current of the photodetector is limited by the thermal generation of minority carrier in the inversion layer. The high growth temperature (1000 C) of the gate oxide can reduce the dark current to a level as low as 3 nA/cm 2 . As biased in the inversion layer, the tunneling diode works in the deep depletion region with the soft pinning of oxide voltage, instead of the pinning of surface potentia… Show more

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Cited by 74 publications
(37 citation statements)
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“…Thus, the radiative recombination occurs deeply away from the Ge surface. Moreover, the roughness scattering at Ge/ SiO 2 interface can provide the extra momentum in the indirect recombination 15,16 and can significantly enhance the indirect transition rate. 4͒.…”
mentioning
confidence: 99%
“…Thus, the radiative recombination occurs deeply away from the Ge surface. Moreover, the roughness scattering at Ge/ SiO 2 interface can provide the extra momentum in the indirect recombination 15,16 and can significantly enhance the indirect transition rate. 4͒.…”
mentioning
confidence: 99%
“…4(a), the maximum value of P s is 18706.59 under the bias voltage of 5 V, which is larger than before [11,15]. Furthermore, it was discovered that the device could be driven under small bias voltage with the elongated edge length and the photocurrent is comparatively independent of bias voltage as shown in Fig.…”
Section: Resultsmentioning
confidence: 88%
“…4(b) shows the photocurrent corresponding to illumination irradiance measured under bias voltage of 5 V. Fig. 4(b) is plotted on a logarithmic scale, and the slope κ of curves in this figure is defined as the ratio of photo-generated current increment to illumination irradiance as expressed as [15] …”
Section: Resultsmentioning
confidence: 99%
“…The inversion bias can cause the deep depletion region to collect the photogenerated carriers. 18 Note that the fiber is pointed to the edge of the gate electrode. The minority carriers are generated in the deep depletion region, tunnel from the active absorption layer to the Al gate electrode via the trap-assisted tunneling of the LPD oxide, and form the photocurrent.…”
Section: Resultsmentioning
confidence: 99%