2009
DOI: 10.1016/j.mee.2009.01.088
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A novel microfluidic integration technology for PCB-based devices: Application to microflow sensing

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Cited by 43 publications
(107 citation statements)
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“…Later, Bart et al introduced a novel room-temperature bonding technique based on chemically activated fluorinated ethylene propylene as an intermediate adhesive layer for glass and silicon substrates modified with APTES [114]. Kontakis et al bonded SU-8 microfluidic structures to a PMMA cover using a thin PMMA adhesive layer deposited on SU-8 structures by spin-coating [115]. Gutierrez-Rivera et al formed a 15 nm thick ''conformal adsorbate layer'' on KMPR Ò photoresist and used this thin layer to fabricate multilayer microfluidics by adhesive bonding [116].…”
Section: Sealing Using Adhesive Layersmentioning
confidence: 99%
“…Later, Bart et al introduced a novel room-temperature bonding technique based on chemically activated fluorinated ethylene propylene as an intermediate adhesive layer for glass and silicon substrates modified with APTES [114]. Kontakis et al bonded SU-8 microfluidic structures to a PMMA cover using a thin PMMA adhesive layer deposited on SU-8 structures by spin-coating [115]. Gutierrez-Rivera et al formed a 15 nm thick ''conformal adsorbate layer'' on KMPR Ò photoresist and used this thin layer to fabricate multilayer microfluidics by adhesive bonding [116].…”
Section: Sealing Using Adhesive Layersmentioning
confidence: 99%
“…First, the electrical components are fabricated on a PCB and then an SU-8 layer is coated on the PCB to planarize and aid the adherence of the fluidics which are subsequently patterned in an additional SU-8 layer. In one case, 86 platinum (Pt) resistors were fabricated on a PCB (by Pt sputtering followed by a lift-off process) to serve as temperature sensing elements. A microfluidic flow channel was then patterned on a second layer of SU-8 ( Fig.…”
Section: Technology Overview and Demonstrated Prototypesmentioning
confidence: 99%
“…This technology allows the manufacturing of microsystems by the technique used in printed circuit technology. PCB-MEMS technologies have proven to be reliable to build relatively complex microfluidic systems at a low cost [9], [10]. It has a big potential because of the lower production and material costs in comparison to other technologies for microfluidics.…”
Section: Introductionmentioning
confidence: 99%