2002
DOI: 10.1016/s0040-6090(02)00725-3
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A novel method of fabricating ZnO/diamond/Si multilayers for surface acoustic wave (SAW) device applications

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Cited by 59 publications
(28 citation statements)
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“…Recently, much attention has been paid to high quality piezoelectric ZnO films for SAW devices with operation frequencies higher than 1 GHz, whereas even greater frequencies (superior to 2.5 GHz) tend to push the limits of conventional photolithography [8] . The use of ZnO based on diamond as SAW substrates [8][9][10][11][12][13][14] offers an attractive means for relaxation of the lithographic criteria since diamond has the highest stiff coefficient and sound velocity. SAW devices have been reported based on ZnO/ diamond/Si layered structures with a diamond layer of 10-100 μm deposited by chemical vapour deposition (CVD) technique [9][10][11][12][13][14] .…”
mentioning
confidence: 99%
“…Recently, much attention has been paid to high quality piezoelectric ZnO films for SAW devices with operation frequencies higher than 1 GHz, whereas even greater frequencies (superior to 2.5 GHz) tend to push the limits of conventional photolithography [8] . The use of ZnO based on diamond as SAW substrates [8][9][10][11][12][13][14] offers an attractive means for relaxation of the lithographic criteria since diamond has the highest stiff coefficient and sound velocity. SAW devices have been reported based on ZnO/ diamond/Si layered structures with a diamond layer of 10-100 μm deposited by chemical vapour deposition (CVD) technique [9][10][11][12][13][14] .…”
mentioning
confidence: 99%
“…It has used in many applications such as photodetectors, gas sensors, light emitting diodes, surface acoustic wave devices, optical switches and dye sensitized solar cells [1][2][3][4][5][6]. ZnO shows higher electronic mobility and similar energy level as that of the conduction band of TiO 2 which makes ZnO a capable material to be used as a photoelectrode material for the fabrication of efficient dye sensitized solar cells.…”
Section: Introductionmentioning
confidence: 99%
“…Polycrystalline diamond is also reported to be applicable in electrocatalysis [5] and to be suitable for neutron filters [6], heatspreaders [7], for construction of surface acoustic wave devices [8], for radiation dosimetry [9], or for electrochemical detection of trace substances [10].…”
Section: Introductionmentioning
confidence: 99%