A novel MEMS LTCC switch matrix

Yassini, Bahram; Choi, S. D.; Zybura, A.; Yu, Ming; Mihailovich, R.E.; DeNatale, J.F.

doi:10.1109/mwsym.2004.1339060

Cited by 30 publications

(7 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In comparison with the only previously reported hybrid switch matrix [4], the monolithic switch matrix presented in this paper, operates at much higher frequency range and offers a much better isolation. In addition, the monolithic fabrication of the matrix significantly enhances the fabrication yield and reproducibility.…”

Section: Monolithic Switch Matrix Integrationmentioning

confidence: 87%

Monolithic RF MEMS Switch Matrix Integration

Daneshmand

Mansour

2006

2006 IEEE MTT-S International Microwave Symposium Digest

View full text Add to dashboard Cite

In this paper, for the first time, monolithic integration of an RF MEMS switch matrix is presented. Novel SP3T RF MEMS switches are designed and monolithically integrated with an electromagnetically coupled interconnect network. A thin film fabrication process exclusively for this purpose is developed and fine tuned. A prototype unit of a 3 x 3 monolithic switch matrix is fabricated and tested. The measured results show a good RF performance for the frequency range of 9.5GHz to 13.5GHz. The proposed monolithic 3 X 3 switch matrix can be easily expanded to a larger matrices using Clos networks.

show abstract

Section: Monolithic Switch Matrix Integrationmentioning

confidence: 87%

Monolithic RF MEMS Switch Matrix Integration

Daneshmand

Mansour

2006

2006 IEEE MTT-S International Microwave Symposium Digest

View full text Add to dashboard Cite

show abstract

“…The device is realized above a silicon substrate ( realization of very compact high-order switching matrices, particularly interesting for space and satellite applications thanks to their reduced footprint and very limited weight. Some examples available in literature are reported in Fomani and Mansour (2009) and Yassini et al . (2004).…”

Section: Single Pole Double Throws and Switching Matricesmentioning

confidence: 99%

RF MEMS passive components for wireless applications

Iannacci

2013

Handbook of Mems for Wireless and Mobile Applications

View full text Add to dashboard Cite

“…The switch matrices are mainly used for signal routing. Additionally, switching networks allow flexible interconnections between various ports and channels [8]- [10]. A nano switch matrix cell is the fundamental component for nano matrix network.…”

Section: Rfmentioning

confidence: 99%

Wideband RF nano switch matrix

Yang

Chan

Ramer

2011

2011 IEEE International Symposium on Antennas and Propagation (APSURSI)

View full text Add to dashboard Cite

This paper presents, for the first time, a RF nano switch matrix cell for 0-50GHz wideband applications. The RF nano switch matrix cell can be used to implement scalable RF nano switch matrix. The single cell unit is designed with four metals structures on alumina substrate. Simulation results indicate that the designed RF nano device can potentially achieve good RF performance in the frequency range of interest. Surface micromachining is developed to fabricate the proposed nano matrix cell. Fabrication leverages standard ICs process has potential to realize hybrid-integration of RF nano devices with RFIC circuits.

show abstract

A novel MEMS LTCC switch matrix

Cited by 30 publications

References 3 publications

Monolithic RF MEMS Switch Matrix Integration

Monolithic RF MEMS Switch Matrix Integration

RF MEMS passive components for wireless applications

Wideband RF nano switch matrix

Contact Info

Product

Resources

About