2014
DOI: 10.1117/12.2069753
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A novel measuring device for step gauge

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(2 citation statements)
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“…Specific examples of this layout include a modified SIP F1A length measuring machine used for step gauge measurement at LNE [30] and the Laser automatic interferometric comparator (AIC) developed at NIM [31]. This layout has the same limitation as the use of a mechanical linkage in that it requires a length in free space between the reflector and the interferometer at least as long as the length of the maximum artefact to be measured.…”
Section: Minimising Abbe Errormentioning
confidence: 99%
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“…Specific examples of this layout include a modified SIP F1A length measuring machine used for step gauge measurement at LNE [30] and the Laser automatic interferometric comparator (AIC) developed at NIM [31]. This layout has the same limitation as the use of a mechanical linkage in that it requires a length in free space between the reflector and the interferometer at least as long as the length of the maximum artefact to be measured.…”
Section: Minimising Abbe Errormentioning
confidence: 99%
“…Most commonly used are the equations derived by Edlén [46], as modified and subsequently corrected by Birch and Downs [47,48]. Recent instruments developed by Lassila et al [27,32], Picotto et al [33,49], Eom and Han [42] and Sun et al [31] all utilise the modified Edlén equations for refractive index compensation. To do this measurements are required of air temperature, pressure, humidity and in some cases carbon dioxide, although standard conditions for the latter are often assumed except for the highest accuracy systems [22].…”
Section: Compensating For Air Refractive Indexmentioning
confidence: 99%