2014
DOI: 10.1088/1674-1056/23/12/127303
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A novel LDMOS with a junction field plate and a partial N-buried layer

Abstract: A novel LDMOS with a junction field plate and a partial N-buried layer * Shi Xian-Long(石先龙) a) , Luo Xiao-Rong(罗小蓉) a)b) † , Wei Jie(魏 杰) a) , Tan Qiao(谭 桥) a) , Liu Jian-Ping(刘建平) a) , Xu Qing(徐 青) a) , Li Peng-Cheng(李鹏程) a) , Tian Rui-Chao(田瑞超) a) , and Ma Da(马 达) a) a) State

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Cited by 2 publications
(1 citation statement)
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References 12 publications
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“…[1][2][3][4][5][6] The dielectric trench in the drift region of LDMOS devices is adopted as an effective technique to enhance breakdown voltage and reduce specific on-resistance R on,sp . [7][8][9][10][11] State-of-theart LDMOS devices obtained by the dielectric trench to sustain a high reversed voltage have been reported. [12][13][14][15][16][17] In these devices, breakdown occurs in the drift region for the crowded electric field.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6] The dielectric trench in the drift region of LDMOS devices is adopted as an effective technique to enhance breakdown voltage and reduce specific on-resistance R on,sp . [7][8][9][10][11] State-of-theart LDMOS devices obtained by the dielectric trench to sustain a high reversed voltage have been reported. [12][13][14][15][16][17] In these devices, breakdown occurs in the drift region for the crowded electric field.…”
Section: Introductionmentioning
confidence: 99%