A novel integrated micromachined tunable laser using polysilicon 3-D mirror

Liu, A.Q.; Zhang, Xuming; Murukeshan, Vadakke Matham; Lam, Yee Loy

doi:10.1109/68.920739

Cited by 37 publications

(51 citation statements)

References 9 publications

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“…The wavelength tuning is obtained by translation of the external mirror to introduce mode hopping over the cavity modes in addition to the possible small wavelength shift of the modes. The range of wavelength change is typically 1-20 nm, depending on the cavity length, feedback strength, and other laser parameters [1], [3], [4], [7], [14]. Such lasers do not need a pivot to rotate the mirror and, thus, have a simple structure, but they cannot reach some wavelengths within their tuning range since the tuning is not continuous.…”

Section: A Applications Of Pivot To Mems Tunable Lasersmentioning

confidence: 98%

“…According to the tuning behaviors, the MEMS lasers are either discontinuously tunable, or quasi-continuously tunable, or continuously tunable. The first two types commonly make use of a mirror [1], [4], [7] or a two-mirror Fabry-Pérot (FP) interferometer [3] as the external reflector to form the external cavity. The wavelength tuning is obtained by translation of the external mirror to introduce mode hopping over the cavity modes in addition to the possible small wavelength shift of the modes.…”

Section: A Applications Of Pivot To Mems Tunable Lasersmentioning

confidence: 99%

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A Real Pivot Structure for MEMS Tunable Lasers

Zhang

Liu

et al. 2007

J. Microelectromech. Syst.

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This paper presents the design of a real pivot formed by a double-clamped beam for the rotational tuning structures in microelectromechanical systems (MEMS) tunable lasers. Micromechanical properties such as beam deformation, pivot position and pivot shift are investigated and compared with the virtual pivot formed by a cantilever beam. It is shown that the real pivot has negligible shift when subjected to load and fabrication error owing to its feature of structural symmetry, while the virtual pivot suffers from significant pivot shift, which would severely limit the wavelength tuning range. The two pivot designs are implemented into MEMS tuning structures that are fabricated by deep etching and released using a dry release approach. The real pivot measures a depth variation of 16% over the double-clamped beam but maintains the symmetry to the midpoint, and is still able to produce a rotation angle of 4.7 . In contrast, the virtual pivot has a depth reduction of 4% over the cantilever beam, but achieves only a 2.4 rotation due to the pull-in problem originated from the severe pivot shift. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust, and suitable for single-chip integration.[2006-0112]

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Section: A Applications Of Pivot To Mems Tunable Lasersmentioning

confidence: 98%

Section: A Applications Of Pivot To Mems Tunable Lasersmentioning

confidence: 99%

A Real Pivot Structure for MEMS Tunable Lasers

Zhang

Liu

et al. 2007

J. Microelectromech. Syst.

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“…1,2 Microelectromechanical systems ͑MEMS͒ technology has been shown to be very promising in miniaturizing tunable lasers. [3][4][5][6][7] The precision and stable movement of the microactuators enables fine wavelength tuning. The small size of the micromachined mirrors facilitates fast tuning speed and low power consumption.…”

mentioning

confidence: 99%

“…However, the previous MEMS lasers have focused on continuous wavelength tuning. [3][4][5][6][7] To this end, complicated mechanical movement control had to be engaged, making the devices bulky and less cost effective. In fact, continuous wavelength tuning is not absolutely necessary in some applications.…”

mentioning

confidence: 99%

Discrete wavelength tunable laser using microelectromechanical systems technology

Zhang

Liu

Tang

et al. 2004

Applied Physics Letters

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A discrete wavelength tunable laser has been demonstrated using microelectromechanical systems (MEMS) technology. The laser system is formed by integrating a semiconductor laser, a single-mode optical fiber, and a MEMS mirror onto a single chip. It has overall dimensions of 1.5 mm×1 mm×0.6 mm (not including the optical fiber), and can be tuned to sweep a wavelength range of 13.5 nm within 1 ms. Unlike the conventional continuously tunable lasers, the laser system enables discrete wavelength tuning by making use of a short external cavity and weak feedback.

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“…Another integrated tunable laser device of 2 × 1.5 mm size was fabricated and studied for potential applications in WDM systems [88]. This device uses a polysilicon three-dimensional (3-D) micromirror integrated with a FP laser diode and a self-contained optical filter.…”

Section: New Perspective Ectl Systemsmentioning

confidence: 99%

External cavity wavelength tunable semiconductor lasers - a review

Mroziewicz

2008

Opto-Electronics Review

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External cavity tunable lasers have been around for many years and now constitute a large group of semiconductor lasers featuring very unique properties. The present review has been restricted to the systems based on the edge emitting diode lasers set-up in a hybrid configuration. The aim was to make the paper as concise as possible without sacrificing, however, most important details. We start with short description of the fundamentals essential for operation of the external cavity lasers to set the stage for explanation of their properties and some typical designs. Then, semiconductor optical amplifiers used in the external cavity lasers are highlighted more in detail as well as diffraction gratings and other types of wavelength-selective reflectors used to provide optical feedback in these lasers. This is followed by a survey of designs and properties of various external cavity lasers both with mobile bulk gratings and with fixed wavelength selective mirrors. The paper closes with description of some recent developments in the field to show prospects for further progress directed towards miniaturization and integration of the external cavity laser components used so far to set-up hybrid systems.

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A novel integrated micromachined tunable laser using polysilicon 3-D mirror

Cited by 37 publications

References 9 publications

A Real Pivot Structure for MEMS Tunable Lasers

A Real Pivot Structure for MEMS Tunable Lasers

Discrete wavelength tunable laser using microelectromechanical systems technology

External cavity wavelength tunable semiconductor lasers - a review

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