A novel diffractive micro-optical modulator for mobile display applications

Yun, Sang Kyeong; Song, Jay Hyok; An, Sung Yong; Yeo, Injae; Choi, Yong-Sung; Lee, Yeong-Gyu; Park, HeungWoo; Han, Kyung-Lyong; Yang, Hilda; Yurlov, Victor; Shyshkin, Ihar; Lapchuk, Anatoliy; Kim, HeeYeoun; Jang, Jaewook; Kyoung, JeHong; Yang, Jeong-Suong; Yoon, Seok–Jin; Park, Changsu; Cheong, Jongpil; Hwang, Y.N.; Woo, Ki-Suk; Ryu, Seung-Won; Lee, SeungWoo; Koh, ChongMann; Baek, YoungKi; Bae, DaeHo; Lee, Hyunkee; Lee, JaeHoon; Ryu, Young-Gyoon; Hwang, HaeYeon; Yang, Chul Ju; Lim, OhkKun; Park, Dong-Hyun; An, SeHwan; Bae, JunHee; Cho, Sung-Min; Go, BackSoon; Hong, Seok-Kee; Jung, HoPhil; Kim, Sang-Jin; Lee, KiUn; Park, Jihyun; Yang, JuHwan; Byun, GiYoung; Byun, SungHo; Cho, Youngjin; Kim, ChunGi; Kim, JooHong; Kim, SunKi; Lee, SungIl; Lee, WhaHyung; Oh, Kwang W.; Oh, SungKyung; Shin, WooChul; Song, Bong‐Gee; Bourim, El Mostafa

doi:10.1117/12.762568

Cited by 20 publications

(10 citation statements)

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“…Therefore, it is the optimal solution for many optical devices [1][2][3][4][5][6]. However, the quality of images created using coherent laser illumination severely deteriorates because of granular modulation caused by speckle phenomena [7,8].…”

Section: Introductionmentioning

confidence: 99%

Experimental evaluation of speckle suppression efficiency using a moving 2D Barker code DOE

et al. 2013

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This paper reports the findings from an experimental evaluation of speckle suppression efficiency using a method based on a moving 2D Barker code diffractive optical element (DOE). The optical setup and the optical scheme parameters of the method are presented. A speckle contrast of ~4.4-5.3% and speckle suppression coefficient (coefficient of speckle contrast reduction) of k>8 was obtained in experiments. However, the experimentally obtained speckle suppression coefficient was approximately 1.5 times smaller than the theoretical prediction. It is speculated that the discrepancy between the theoretical and the experimental data is due to an inexact match between the optical setup and the optimal optical parameters of the method. Analysis of the experimental data revealed that once the optical scheme is optimized, it will be possible to obtain a speckle suppression that is closer to the theoretical prediction.

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Section: Introductionmentioning

confidence: 99%

Experimental evaluation of speckle suppression efficiency using a moving 2D Barker code DOE

et al. 2013

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“…This makes it difficult to choose the ideal Schlieren stop position for all three colors and thus limits the contrast ratio of the system. Scalar theory approach was used for theoretical estimation of the influence of these parameters on CR of image [1]. Schlieren stop was introduced in our algorithm by applying truncation function R(ξ) in spatial frequency domain.…”

Section: Optical Performance Estimation Of Fine Pitch Sommentioning

confidence: 99%

“…Small size and large optical efficiency are the main challenges in technology development of portable projection displays. Recently, the SOM device, the one-dimensional micro-actuation light modulator, is successfully developed by Samsung Electro-Mechanics for an accessory or embedded projection module [1][2][3][4][5][6][7][8][9][10]. But the previously developed SOM device, integrated in an optical module, has a volume bigger than 15 cc and entire module is considered to be too big in volume for being embedded in the mobile device.…”

Section: Introductionmentioning

confidence: 99%

Fine-pitch high-efficiency spatial optical modulator for mobile display applications

et al. 2009

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Diffractive spatial optical modulators (SOM) with fine pitch pixel array were introduced for the mobile applications of laser projection display which requires the small volume, low power consumption and high optical efficiency. Micromechanical designs of piezoelectric (PZT) actuator and mirror ribbon structure were optimized for small volume, but keeping the same level of the other performance. Even though the same design rule and fabrication equipment were used for 10 um pitch SOM and 16 um pitch SOM, the optical efficiency of the fine pitch SOM was 78 % for the 0 th order diffraction and is better than that of 16 um pitch SOM (73%). The full on/off contrast ratio has no difference between 10 um pitch and 16 um pitch SOM. All the optical characteristics coincide well with the theoretical estimations. High displacement of 500nm, which is enough to modulate the three Red, Green and Blue colors were achieved by the control of the thicknesses and stresses of constituent structural layers. It was found that the stress of Pt/PZT/Pt actuating layer was the main parameter affecting the initial gap height of the ribbon and also its displacement. For improving the optical properties of the SOM devices, the required ribbon-flatness could be achieved by applying a stress gradient on the SiN layer to compensate for the stress unbalance between Al mirror and SiN supprting layer. The temperature sensitive characteristics of the SOM device, which degrades the image quality, could be minimized by a mechanical compensation method using a thermal expansion effect of Si substrates. This concept could be applied in most of the bridge type MEMS structure. The most critical parameter which limit the SOM device lifetime was found to be the ribbon displacement degradation. By using a temperature accelerating lifetime measurement method based on the displacement degradation the estimated lifetime was more than 4,000 hrs and is of acceptable level in the mobile application. In short, the developed fine pitch SOM device, for making small volume of optical module, has sufficient response time and ribbon displacement for modulating the red, blue and green colors with one SOM chip and is suitable for high quality embedded laser projection displays. Optical module with VGA is successfully demonstrated for its potential applications in mobile laser projection display such as a embed projection cellular phone.

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“…A similar wide range of applications is addressed by the Grating Light valve of Silicon Light Machines, like e. g. imaging [3] and computer to plate printing (CTP) [4]. Samsung presented a programmable grating for display applications based on piezoelectric actuation [5] and e. g. Fujitsu developed a micro mirror array for large optical cross connects [6]. Various micro mirror arrays and deformable mirrors for adaptive optics were presented in the past like e. g. that of Boston Micromachines [7].…”

Section: Introductionmentioning

confidence: 99%

The high versatility of silicon based micro-optical modulators

Schenk

2009

SPIE Proceedings

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"One product, one process": This MEMS law is true for micro-optical modulators, too and thus puts a high load on every product and technology development team. On the other hand the law expresses nothing but the high versatility of the underlying usually silicon based technology. A huge variety of applications where an electromagnetic wave experiences a spatial-temporal modulation makes use of this technology: High resolution as well as ultra-compact displays, optical switches in telecommunication as well as data storage devices, spectrometers e. g. for quality control, as well as adaptive optics and pattern generation to mention only a few. The applications completely differ with regard to the requirements in almost all aspects. The most important drivers to use silicon based micro-optical modulators are high accuracy, high bandwidth and high miniaturization. A continuous further development of the technology can be reported. Novel optical, mechanical and electrical working principles are investigated to meet future requirements. After a short overview of the most typical applications of silicon based micro-optical modulators the high versatility of this technology is detailed by means of selected devices and applications. Single 1D and 2D micro mirrors with diameters of up to 4 mm e. g. for projection, imaging and spectroscopy are as well presented and discussed as micro mirror arrays comprising up to 1 million analog deflectable mirrors for image generation and phase modulation in microlithography and adaptive optics

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A novel diffractive micro-optical modulator for mobile display applications

Cited by 20 publications

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Experimental evaluation of speckle suppression efficiency using a moving 2D Barker code DOE

Experimental evaluation of speckle suppression efficiency using a moving 2D Barker code DOE

Fine-pitch high-efficiency spatial optical modulator for mobile display applications

The high versatility of silicon based micro-optical modulators

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