“…Piezoelectric actuators have several advantages, including their small size, light weight, strong driving force, low noise, nanometer-level resolution, ultra-high repeatable positioning accuracy, and excellent dynamic characteristics. As a result, they find wide application in fields such as precision manufacturing [6], biomedicine [7], ultra-precision micro-and nano-processing [8,9], aerospace [10], robotics [11], and precision optics [12]. PZT FSM offers advantages such as fast response speed, high pointing accuracy, a high resonant frequency, and strong resistance to electromagnetic interference.…”