A novel CVD polymeric anti-reflective coating (PARC) for DRAM, flash and logic device with 0.1 μm CoSi/sub 2/ gate

Linliu, Kung; Kuo, Mai-Rue; Huang, Yi-Ren; Lin, Shy-Jay; Jeng, Shin-Puu; Chen, Chun-Shing

doi:10.1109/vlsit.2000.852764

2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104)

DOI: 10.1109/vlsit.2000.852764

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A novel CVD polymeric anti-reflective coating (PARC) for DRAM, flash and logic device with 0.1 μm CoSi/sub 2/ gate

Kung Linliu¹,

Mai-Rue Kuo²,

Yi-Ren Huang³

et al.

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A novel CVD polymeric anti-reflective coating (PARC) for DRAM, flash and logic device with 0.1 μm CoSi/sub 2/ gate

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