A Novel Configurable MEMS Inertial Switch using Microscale Liquid-Metal Droplet

Yoo, Kwanghyun; Kim, Joonwon

doi:10.1109/memsys.2009.4805502

Cited by 15 publications

(6 citation statements)

References 9 publications

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“…This microfluidic switch has simple preparation technology and high reliability, but the working temperature range of glycerol is narrow (−17.8 °C-290 °C). Liu et al [86], Yoo et al [5], Li et al [7] also designed micro-fluid inertial switches based on the principle of inertial flow. They used mercury or an ultra-low temperature conductive fluid as working fluids.…”

Section: Passive Inertial Switchesmentioning

confidence: 99%

“…The extension of contact duration can be achieved by decreasing the stiffness of electrodes; utilizing latching mechanisms including mechanical self-locking, a bistable mechanism and a wedge-shaped channel, etc. [ 4 , 5 , 6 , 7 , 8 , 74 , 77 , 80 ]. The contact resistance can be reduced by using the contact materials with low resistivity [ 13 , 57 ] and increasing the contact force [ 80 , 165 ].…”

Section: The Development Trend Of Mems Switchesmentioning

confidence: 99%

“…The rise of MEMS switches provides strong technical support for the development of signal control systems. At present, the demand for MEMS switches mainly comes from military security systems [ 4 , 5 , 6 , 7 ], the automobile industry [ 8 , 9 ], the wireless communication field [ 10 , 11 , 12 , 13 , 14 , 15 ], medical apparatus and instruments [ 9 , 16 ], micro-optical electromechanical systems (MOEMS) [ 17 , 18 , 19 ] and more. Over the last few decades, various types of MEMS switches have been developed.…”

Section: Introductionmentioning

confidence: 99%

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Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

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Section: Passive Inertial Switchesmentioning

confidence: 99%

Section: The Development Trend Of Mems Switchesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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“…Yoo and Park et al [32][33][34] presented a microscale liquid-metal droplet in a microstructured channel that serves as the movable electrode for detecting the applied acceleration. The designed and fabricated single-axial inertial switch is depicted in Fig.…”

Section: Inertial Switches Using Liquid-metal Droplet As a Movable El...mentioning

confidence: 99%

Micromachined threshold inertial switches: a review

Younis

2022

J. Micromech. Microeng.

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This paper presents a review of the recent advances on micromachined inertial switches/triggers. The review focuses on their advantages and disadvantages, sensitive directions, mechanisms of contact-enhancement, threshold accuracy, and the tunability of the acceleration threshold. Several applications of these sensors are highlighted including in healthcare, structural health monitoring, internet of things (IoT), and military. Recent contemporary research directions are also discussed, such as multi-directions/axis, multi-threshold sensors, and machine learning implementation. The article concludes with discussion on future development trends and performance improvements of inertial switches.

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“…Generally, the solid-to-solid electrical contacts, which use solid proof masses and beams, are susceptible to arcing, contact erosion, adhesion, micro welding, and oxidation, resulting in increasing the contact resistance dramatically [ 12 , 13 ]. By comparison, the microfluidics inertial switch is a typical representative of using microdroplet as sensing element, which can avoid the problems of signal bouncing and contact wear during the switching motion [ 14 ]. Therefore, this research field has received extensive attention in recent years.…”

Section: Introductionmentioning

confidence: 99%

Study on Electrical Performance of a U-Type Microfluidic Acceleration Switch Using Salt Solution as the Sensitive Electrode

Shen

Chen

Chang

et al. 2020

Sensors

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The threshold of microfluidic inertial switch is excessively dependent on the size of the passive valve structure and the gas–liquid surface energy of working liquid. How to achieve high threshold and anti-high overload using liquid with low viscosity and low surface tension is a challenging work. Based on the designed U-type microfluidic inertial switch, the electrical characteristic of salt solution at microscale as well as the threshold and dynamic electrical performance of switch were studied. The VOF and CSD modules in CFD software were employed to analyze the dynamic flow process, and then the air–liquid surface moving displacement curve was compared by the theoretical model. A self-designed acceleration test platform was utilized to measure the static threshold, dynamic threshold, and anti-high overload of the inertial switch. The results show that the U-type microfluidics inertial switch using salt solution as sensitive electrode has better performance in power connection and anti-high overload. In particular, it also has the ability to achieve a range of dynamic threshold by changing the placement of the contact electrode, which can achieve rapid power on and off.

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A Novel Configurable MEMS Inertial Switch using Microscale Liquid-Metal Droplet

Cited by 15 publications

References 9 publications

Research Status and Development Trend of MEMS Switches: A Review

Research Status and Development Trend of MEMS Switches: A Review

Micromachined threshold inertial switches: a review

Study on Electrical Performance of a U-Type Microfluidic Acceleration Switch Using Salt Solution as the Sensitive Electrode

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