A novel 0–3 kPa piezoresistive pressure sensor based on a shuriken-structured diaphragm

Guan, Taotao; Fu, Yang; Wang, Wei; Huang, Xintang; Jiang, Boyan; He, Jun; Zhang, Li; Fu, Fengshan; Li, Dan; Li, Rui; Zhao, Qiancheng; Zhang, Dacheng

doi:10.1109/memsys.2016.7421754

Cited by 4 publications

(1 citation statement)

References 7 publications

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“…Zhao et al (2016) [16] proposed a bossed diaphragm with a peninsula-island structure, which was able to give sensitivity of 0.066 mV/V/kPa and nonlinearity error of 0.42% FSS. Guan et al (2016) [17] obtained sensitivity of 4.72 mV/V/kPa and nonlinearity error of 0.18% FSS by designing the shuriken-structure diaphragm. Xu et al (2017) [18] proposed the diaphragm with groove and peninsula island, which provided sensitivity of 60 mV/V/kPa and nonlinearity error of 0.36% FSS.…”

Section: Introductionmentioning

confidence: 99%

Enhancing Performance of a MEMS-Based Piezoresistive Pressure Sensor by Groove: Investigation of Groove Design Using Finite Element Method

Thawornsathit

Juntasaro²,

Rattanasonti³

et al. 2022

Micromachines

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The optimal groove design of a MEMS piezoresistive pressure sensor for ultra-low pressure measurement is proposed in this work. Two designs of the local groove and one design of the annular groove are investigated. The sensitivity and linearity of the sensor are investigated due to the variations of two dimensionless geometric parameters of these grooves. The finite element method is used to determine the stress and deflection of the diaphragm in order to find the sensor performances. The sensor performances can be enhanced by creating the annular or local groove on the diaphragm with the optimal dimensionless groove depth and length. In contrast, the performances are diminished when the local groove is created on the beam at the piezoresistor. The sensitivity can be increased by increasing the dimensionless groove length and depth. However, to maintain low nonlinearity error, the annular and local grooves should be created on the top of the diaphragm. With the optimal designs of annular and local grooves, the net volume of the annular groove is four times greater than that of the local groove. Finally, the functional forms of the stress and deflection of the diaphragm are constructed for both annular and local groove cases.

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