A non-singular helicon wave equation for a non-uniform plasma

Sudit, Isaac D.; Chen, F F

doi:10.1088/0963-0252/3/4/018

Cited by 14 publications

(13 citation statements)

References 2 publications

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“…Figure 2(a) shows field profiles for an R-antenna compared with theoretical curves computed for the m = +1 and m = −1 circularly polarized modes taking into account the measured plasma density profile [12,13]. The data agree well with the m = +1 mode and not at all with the m = −1 mode.…”

Section: Mode Structurementioning

confidence: 87%

Downstream physics of the helicon discharge

Chen¹,

Sudit²,

Light³

1996

Plasma Sources Sci. Technol.

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Abstract. Measurements of the radial and axial profiles of both the plasma parameters and the wave properties in a long, thin helicon discharge show that most of the RF power is deposited near the antenna and that a dense, cool (T e < 2 eV) plasma can be obtained in the downstream region. The density n and electron temperature T e profiles in that region can be explained quantitatively with classical collisional theory, and factor-of-two agreement can be obtained on total particle and energy balance. Spatial modulation of the helicon wave amplitude can be explained by the beating of two different radial modes launched simultaneously by the antenna. Though the helicon wave can be shown to be essential to the production of high densities, it plays little role in the downstream evolution of the plasma. These results indicate that helicon discharges can produce the cool plasmas normally associated with afterglows without the attendant loss of density.

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Section: Mode Structurementioning

confidence: 87%

Downstream physics of the helicon discharge

Chen¹,

Sudit²,

Light³

1996

Plasma Sources Sci. Technol.

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“…The method of rf compensation which we employ includes not only an rf filter but also a floating electrode which is close-coupled to the probe tip. 10 This forces the probe to follow fluctuations in floating potential V f , which may be Ͼ100 V in amplitude. The dc averaged probe characteristic then reproduces the instantaneous characteristic accurately, and reliable measurements of T e and V s can be made.…”

Section: Kinetic Effectsmentioning

confidence: 99%

Physics of helicon discharges

1996

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Because of their high density, low-pressure discharges ionized by helicon waves are being studied for their possible use in cluster tools for the fabrication of next-generation computer chips. How helicon waves are related to whistler waves and waves in a plasma-filled waveguide is explained, and the mystery of the high ionization efficiency is outlined. Experimental data on the waves and the equilibrium properties of the discharge are shown, and the status of our current understanding of the physical processes therein is summarized. The importance of kinetic effects and of a short-wavelength mode arising at low magnetic fields is evaluated. Applications of helicon discharges to such diverse fields as plasma accelerators, microwave generators, and tokamak physics are illustrated. Low-temperature plasma physics is often considered a discipline so different from high-temperature plasma physics that there is little overlap, but these studies show that the techniques developed in fusion and space plasma physics can be applied to technological plasmas as well.

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“…11, the measured rf magnetic field profiles were compared with calculations based on a reduced onedimension ͑1D͒ wave equation. 12,13 The eigenvalues and eigenfunctions of m = +1 and m = −1 circularly polarized modes are numerically solved. The measured fields were in agreement with those of the m = +1 modes, but it remained unclear why the m = −1 modes were absent in the experiment that was designed to excite them.…”

Section: Introductionmentioning

confidence: 99%

Measurements and modeling of radio frequency field structures in a helicon plasma

et al. 2011

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Measurements of the radio frequency ͑rf͒ field structure, plasma density, and electron temperature are presented for a 1 kW argon helicon plasma source. The measured profiles change considerably when the equilibrium magnetic field is reversed. The measured rf fields are identified as fields of radially localized helicon waves, which propagate in the axial direction. The rf field structure is compared to the results of two-dimensional cold plasma full-wave simulations for the measured density profiles. Electron collision frequency is adjusted in the simulations to match the simulated and measured field profiles. The resulting frequency is anomalously high, which is attributed to the excitation of an ion-acoustic instability. The calculated power deposition is insensitive to the collision frequency and accounts for most of the power supplied by the rf-generator.

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A non-singular helicon wave equation for a non-uniform plasma

Cited by 14 publications

References 2 publications

Downstream physics of the helicon discharge

Downstream physics of the helicon discharge

Physics of helicon discharges

Measurements and modeling of radio frequency field structures in a helicon plasma

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