Downstream physics of the helicon discharge

Chen, Francis F.; Sudit, Isaac D.; Light, Max

doi:10.1088/0963-0252/5/2/009

Cited by 76 publications

(86 citation statements)

References 14 publications

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“…10,11 The numerical code in Ref. 10 was designed to calculate the fields in a nonuniform plasma and the simulations were performed for experimentally measured plasma density profiles.…”

Section: Introductionmentioning

confidence: 99%

Measurements and modeling of radio frequency field structures in a helicon plasma

et al. 2011

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Measurements of the radio frequency ͑rf͒ field structure, plasma density, and electron temperature are presented for a 1 kW argon helicon plasma source. The measured profiles change considerably when the equilibrium magnetic field is reversed. The measured rf fields are identified as fields of radially localized helicon waves, which propagate in the axial direction. The rf field structure is compared to the results of two-dimensional cold plasma full-wave simulations for the measured density profiles. Electron collision frequency is adjusted in the simulations to match the simulated and measured field profiles. The resulting frequency is anomalously high, which is attributed to the excitation of an ion-acoustic instability. The calculated power deposition is insensitive to the collision frequency and accounts for most of the power supplied by the rf-generator.

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“…10,11 The numerical code in Ref. 10 was designed to calculate the fields in a nonuniform plasma and the simulations were performed for experimentally measured plasma density profiles.…”

Section: Introductionmentioning

confidence: 99%

Measurements and modeling of radio frequency field structures in a helicon plasma

et al. 2011

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“…We will approximate the microscopic heat flux q e using the Braginskii closure for the two-fluid equations, 23 which is valid when k ee ( l char: . In cgs units, the heat flux 24 …”

Section: @ @Tmentioning

confidence: 99%

One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma

Chaplin

Bellan

2015

Journal of Applied Physics

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A time-dependent two-fluid model has been developed to understand axial variations in the plasma parameters in a very high density (peak n e տ 5 Â 10 19 m À3 ) argon inductively coupled discharge in a long 1.1 cm radius tube. The model equations are written in 1D with radial losses to the tube walls accounted for by the inclusion of effective particle and energy sink terms. The ambipolar diffusion equation and electron energy equation are solved to find the electron density n e ðz; tÞ and temperature T e ðz; tÞ, and the populations of the neutral argon 4s metastable, 4s resonant, and 4p excited state manifolds are calculated to determine the stepwise ionization rate and calculate radiative energy losses. The model has been validated through comparisons with Langmuir probe ion saturation current measurements; close agreement between the simulated and measured axial plasma density profiles and the initial density rise rate at each location was obtained at p Ar ¼ 30 À 60 mTorr. We present detailed results from calculations at 60 mTorr, including the time-dependent electron temperature, excited state populations, and energy budget within and downstream of the radiofrequency antenna. V C 2015 AIP Publishing LLC. [http://dx

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“…A transition between these modes occurs as abrupt density jump at smoothly varying input power [11,22]. In the high mode, the plasma density is normally well above the cut-off for helicons, and traveling waves may arise in the.regions of plasma remote fiom antenna [21,23,24].…”

Section: Propagation and Damping Of Waves In A Source Plasmamentioning

confidence: 99%

Quasistatic Plasma Sources : Physical Principles, Modelling Experiments, Application Aspects

Shamrai¹,

Aleksandrov²,

Bougrov³

et al. 1997

J. Phys. IV France

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Abstract. Magnetic field enhanced rf plasma sources excited by fiame-type antennas (quasistatic plasma sources) are treated theoretically and experimentally. The theoretical model predicts that a significant part of the rf power is absorbed in a source plasma via the excitation of quasi-electrostatic waves. The dependences of absorption on plasma density, external magnetic field, driving frequency, and source dimensions (scaling laws) are obtained.Special experiments on low-power rf signal absorption in a preformed dense plasma corroborate well the theo~y. Results of test experiments with different sources have shown that a behaviour of the discharge in quasistatic sources is in good agreement with theoretical predictions. Using this knowledge, a compact low-power ion source was designed and optimized. Detailed testing of its parameters has shown that this device has good prospects for use as an ion thruster, and for various materials processing applications.

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Downstream physics of the helicon discharge

Cited by 76 publications

References 14 publications

Measurements and modeling of radio frequency field structures in a helicon plasma

Measurements and modeling of radio frequency field structures in a helicon plasma

One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma

Quasistatic Plasma Sources : Physical Principles, Modelling Experiments, Application Aspects

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