“…To date, several methods are available for the synthesis of fluorosilanes. The methods involve the reactions of siloxy compounds with NH 4 F in H 2 SO 4 , hydrofluoric acid, and BF 3 etherate, halogen exchange of chlorosilanes with SbF 3 , ZnF 2 , NH 4 F, CuF 2 , Na 2 SiF 6 , NaPF 6 , NaSbF 6 , NaBF 4 , and Me 3 SnF, and fluorination of hydrosilanes with AgF, PF 5 , Ph 3 CBF 4 , SbF 3 , NOBF 4 or NO 2 BF 4 , and CuF 2 /CCl 4 …”