Abstract:Recent studies (see, for example, [1, 2]) show that large negative ion densities exist in plasma processing discharges, including those of weakly electronegative gases such as SiH4 and CF4. Also, there is strong evidence that the negative ions could be the precursors for particulate formation in processing discharges; see [1], and also other references in [3].Even though it is now well established that large concentrations of negative ions exist in processing discharges, and that they play a crucial role in s… Show more
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