A new route for the deposition of SiO2 sol-gel coatings

Marage, P. E.; Langlet, M.; Joubert, J.C.

doi:10.1016/0040-6090(94)90059-0

Cited by 28 publications

(10 citation statements)

References 26 publications

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“…It was previously shown that a large range of solutions and deposition conditions could be flexibly used for the deposition of homogeneous and dense SiO2 thin films [2]. However, in the course of our investigations some experimental conditions were also observed to lead to undesirable morphology features such as film roughness or local thickness inhomogeneities.…”

Section: Introductionmentioning

confidence: 66%

“…The solution preparation and deposition device were described elsewhere [2]. Deposition experiments were carried out using a horizontal deposition chamber.…”

Section: Methodsmentioning

confidence: 99%

“…In the case of a higher rw ratio, the formation of a xerogel surface network is observed. Because of the high rw value, this surface network is dense [1,2] and is likely to hinder the water and ethanol escape from the deeper layers and to cause a significant delay in the polymerization of silanol species.…”

Section: Rjph/cteosmentioning

confidence: 98%

“…The aerosol-gel process is a new sol-gel deposition technique based on implementation of an aerosol obtained by ultrasonic pulverization of a sol [1][2]. It was previously shown that a large range of solutions and deposition conditions could be flexibly used for the deposition of homogeneous and dense SiO2 thin films [2].…”

Section: Introductionmentioning

confidence: 99%

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Influence of the deposition parameters on the characteristics of aerosol-gel deposited thin films

Langlet

Vautey

1997

J Sol-Gel Sci Technol

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Abstract. The aerosol-gel process is a thin film deposition process based on the sol-gel polymerisation of a liquid film deposited from an ultrasonically sprayed aerosol. This process offers an attractive alternative for the deposition of sol-gel thin films. The effects of the aerosol deposition route on the film characteristics have been investigated with regard to sol-gel chemistry. TEOS solutions have been studied by viscosimetry and FTIR spectroscopy using an ATR device. Silica xerogel coatings have been studied by transmission FTIR and optical microscopy. Film morphology and uniformity depend closely on the aerosol deposition conditions. The film growth is controlled by a droplet coalescence surface phenomenon.

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Section: Introductionmentioning

confidence: 66%

“…The solution preparation and deposition device were described elsewhere [2]. Deposition experiments were carried out using a horizontal deposition chamber.…”

Section: Methodsmentioning

confidence: 99%

Section: Rjph/cteosmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

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Influence of the deposition parameters on the characteristics of aerosol-gel deposited thin films

Langlet

Vautey

1997

J Sol-Gel Sci Technol

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“…It also appears that the use of high surface tension and viscosity liquids decreases the production yield. Typically, a liquid viscosity below 10 cP is preferable to reach acceptable pulverization yields (Marage et al 1994a). Rheological properties of the sol drastically evolve during sol-gel reaction in liquid phase.…”

Section: Aerosol-gel Coating Technology Process Descriptionmentioning

confidence: 99%

Ultrasonic Pulverization of an Aerosol: A Versatile Tool for the Deposition of Sol–Gel Thin Films

Langlet¹

2017

Handbook of Sol-Gel Science and Technology

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Fine droplets with a narrow size distribution are generated from a liquid stream, when an ultrasonic or pneumatic spraying device is used. The liquid containing the sol-gel precursors breaks into droplets that are directed at a substrate, in some cases using a DC voltage for electrospraying. The process of spray deposition encompasses several techniques and many variables. By adjusting the variables, high quality optical films can be achieved. The advantages and disadvantages of these processes are discussed in detail.

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