1997
DOI: 10.1007/bf02436864
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Influence of the deposition parameters on the characteristics of aerosol-gel deposited thin films

Abstract: Abstract. The aerosol-gel process is a thin film deposition process based on the sol-gel polymerisation of a liquid film deposited from an ultrasonically sprayed aerosol. This process offers an attractive alternative for the deposition of sol-gel thin films. The effects of the aerosol deposition route on the film characteristics have been investigated with regard to sol-gel chemistry. TEOS solutions have been studied by viscosimetry and FTIR spectroscopy using an ATR device. Silica xerogel coatings have been s… Show more

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Cited by 4 publications
(2 citation statements)
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“…The amount of the various components and the method of mixing (vortex or sonication), were varied in a univariate manner to find the optimal formulation as observed by optical spectroscopy (see “ Procedure for selection of sol-gel formulation for capillary coating ” section). Observation of sol–gel coating by optical microscopy was previously employed to study uniformity of sol–gel deposition on silicon substrate 35 , 36 . Summary of the results are described below.…”
Section: Resultsmentioning
confidence: 99%
“…The amount of the various components and the method of mixing (vortex or sonication), were varied in a univariate manner to find the optimal formulation as observed by optical spectroscopy (see “ Procedure for selection of sol-gel formulation for capillary coating ” section). Observation of sol–gel coating by optical microscopy was previously employed to study uniformity of sol–gel deposition on silicon substrate 35 , 36 . Summary of the results are described below.…”
Section: Resultsmentioning
confidence: 99%
“…10 SiO 2 films made from the sol-gel method are thought to be generally porous. According to Langlet and co-workers, 11 some experimental conditions led to undesirable morphology features such as too rough a surface or local thickness inhomogeneities. Those inhomogeneities such as dotted films would also occur during our sample preparations and affect the thickness measurement by a NANOSPEC.…”
Section: Methodsmentioning
confidence: 99%