1994
DOI: 10.1557/jmr.1994.1734
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A new procedure for measuring the decohesion energy for thin ductile films on substrates

Abstract: A novel testing technique has been developed capable of measuring the interfacial fracture resistance, Γi, of thin ductile films on substrates. In this technique, the thin film on the substrate is stressed by depositing onto the film a second superlayer of material, having a large intrinsic stress, such as Cr. Subsequent processing defines a precrack at the interface between the film and the substrate. The strain energy available for driving the debond crack is modulated by varying the thickness of the Cr supe… Show more

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Cited by 184 publications
(59 citation statements)
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“…These include pull-off and peel tests(tape tests [21]), scratch testing [22][23][24][25], four point bend tests [26,27], stressed overlayers [28][29][30] , indentation tests [24,[31][32][33], laser spallation tests [34,35], double cantilever beam tests [36,37] and microcantilever deflection etc. We will start with brief review of the most common techniques before going into more detail about the indentation and scratch tests which are often the only available tests for thin hard coatings.…”
Section: Techniques To Assess Interfacial Toughnessmentioning
confidence: 99%
See 1 more Smart Citation
“…These include pull-off and peel tests(tape tests [21]), scratch testing [22][23][24][25], four point bend tests [26,27], stressed overlayers [28][29][30] , indentation tests [24,[31][32][33], laser spallation tests [34,35], double cantilever beam tests [36,37] and microcantilever deflection etc. We will start with brief review of the most common techniques before going into more detail about the indentation and scratch tests which are often the only available tests for thin hard coatings.…”
Section: Techniques To Assess Interfacial Toughnessmentioning
confidence: 99%
“…This requires depositing a thick superlayer on the top of the film of interest so that it increases the apparent film thickness and the total residual stress in the combined coating without altering the tested interface ( [2], [28]). This makes it easier to debond the interface.…”
Section: Stressed Overlayer Testmentioning
confidence: 99%
“…: THIN COPPER FILMS ON SILICA SUBSTRATES Polycrystalline copper films have been vapor deposited or diffusion bonded to silica substrates at thicknesses ranging from less than 0.1 pm to almost 100 pm and tested to determine conditions for delamination (Bagchi et al 1994; Bagchi and Evans, 1996). The films are at yield at the test temperature (20.…”
Section: An Applicationmentioning
confidence: 99%
“…It does not explain how cracks are able to propagate quasi-statically when atomic separation is the fracture mechanism. Recent experiments on metalceramic interfaces (Elssner et al, 1994;Bagchi et al, 1994;Bagchi and Evans, 1996) have provided detailed evidence of quasi-static propagation of interface decohesion cracks in the presence of substantial plasticity in the metal. Another approach, pursued most recently by Suo et al (1993) and Beltz, et al (1996), employs a model which excludes plasticity within some distance D from the crack tip.…”
Section: Introductionmentioning
confidence: 99%