A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production

Tommasi, Alessio; Perrone, Denis; Cocuzza, Matteo; Mosca, R.; Villani, Marco; Zappettini, A.; Calestani, Davide

doi:10.1088/0957-4484/27/38/385503

Cited by 19 publications

(15 citation statements)

References 44 publications

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“…In comparison with the various nanostructured SnO 2 prepared by other methods in Table 1, the crosslinked SnO 2 /NiO network exhibited comparable sensitivity [19,23,47,[49][50][51][52]. We also investigated the ethanol sensitivity of other MEMS compatible sensing materials in Table 1, such as DPN deposited Au/SnO 2 nanocomposites, ZnO nanowires grown on a MEMS microplate, and ZnO tetrapods deposited on a microheater [37,38,51]. Apart from the comparable or better sensitivity, there are several other advantages for the cross-linked SnO 2 /NiO networks including high yield, low device-to-device deviation, cheap and simple processing.…”

Section: Gas-sensing Performancementioning

confidence: 99%

“…Second, some researchers have tried to integrate high-performance MOS nanomaterials onto microheaters, but it is difficult to control and cast the slurry-based MOS nanomaterials onto the suspending heating area of microheaters. Several groups have reported the fabrication of nanomaterialbased MEMS sensors via ink-jet printing, polymeric mask centrifugation, and dip pen nanolithography (DPN) methods [12,[36][37][38][39]. However, the low yield and large device-to-device deviation hampers the sensor fabrication in a large scale.…”

Section: Introductionmentioning

confidence: 99%

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Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors

et al. 2020

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Nowadays, it is still technologically challenging to prepare highly sensitive sensing films using microelectrical mechanical system (MEMS) compatible methods for miniaturized sensors with low power consumption and high yield. Here, sensitive cross-linked SnO 2 :NiO networks were successfully fabricated by sputtering SnO 2 :NiO target onto the etched self-assembled triangle polystyrene (PS) microsphere arrays and then ultrasonically removing the PS microsphere templates in acetone. The optimum line width (~600 nm) and film thickness (~50 nm) of SnO 2 :NiO networks were obtained by varying the plasma etching time and the sputtering time. Then, thermal annealing at 500°C in H 2 was implemented to activate and reorganize the as-deposited amorphous SnO 2 :NiO thin films. Compared with continuous SnO 2 :NiO thin film counterparts, these cross-linked films show the highest response of 9 to 50 ppm ethanol, low detection limits (< 5 ppm) at 300°C, and also high selectivity against NO 2 , SO 2 , NH 3 , C 7 H 8 , and acetone. The gas-sensing enhancement could be mainly attributed to the creating of more active adsorption sites by increased stepped surface in cross-linked SnO 2 :NiO network. Furthermore, this method is MEMS compatible and of generality to effectively fabricate other cross-linked sensing films, showing the promising potency in the production of low energy consumption and wafer-scale MEMS gas sensors.

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Section: Gas-sensing Performancementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors

et al. 2020

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“…More generally downscaling is considered an essential evolution of devices in the field of integrated circuit (IC) and micro electro mechanical system (MEMS). The typical advantages envisaged are the compactness, low energy consumption, and large scale production . The typical fees to pay are related to device heating issues, standard photolithography resolution limits, process compatibility, and process optimization with respect to all the possible critical steps.…”

Section: Introductionmentioning

confidence: 99%

Scaling Organic Electrochemical Transistors Down to Nanosized Channels

D’Angelo

Verna

Ballesio

et al. 2019

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The perspective of downscaling organic electrochemical transistors (OECTs) in the nanorange is approached by depositing poly(3,4‐ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) on electrodes with a nanogap designed and fabricated by electromigration induced break junction (EIBJ) technique. The electrical response of the fabricated devices is obtained by acquiring transfer characteristics in order to clarify the specific main characteristics of OECTs with sub‐micrometer‐sized active channels (nanogap‐OECTs). On the basis of their electrical response to different scan times, the nanogap‐OECT shows a maximum transconductance unaffected upon changing scan times in the time window from 1 s to 100 µs, meaning that fast varying signals can be easily acquired with unchanged amplifying performance. Hence, the scaling down of the channel size to the nanometer scale leads to a geometrical paradigm that minimizes effects on device response due to the cationic diffusion into the polymeric channel. A comprehensive study of these features is carried out by an electrochemical impedance spectroscopy (EIS) study, complemented by a quantitative analysis made by equivalent circuits. The propagation of a redox front into the polymer bulk due to ionic diffusion also known as the “intercalation pseudocapacitance” is identified as a limiting factor for the transduction dynamics.

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“…Low power consumption is an important parameter in evaluating the properties of MEMS gas sensors. It has been widely reported that researchers can improve the performance of gas sensors by constantly optimizing the micro-hotplatform (MHP) (4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14) structure and the morphology of sensing materials. (15)(16)(17)(18)(19) For example, in earlier research on MEMS gas sensors, Lee et al (4) described the great advantage of low power consumption compared with traditional gas sensors.…”

Section: Introductionmentioning

confidence: 99%

Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

Peng¹,

Xie²,

Wang³

et al. 2018

Sensors and Materials

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A gas sensor with low power consumption was manufactured using a suspended microhotplatform (MHP) fabricated by MEMS technology. Tin oxide nanoparticles, synthesized by the hydrothermal method, were deposited on the MHP by dip coating in the form of slurry. The obtained SEM images indicated that nanoparticles were well connected and uniform in size. The gas sensing performance was also investigated in both dynamic and static test systems. In the dynamic test system, the response (R air /R gas) of the sensor exhibited a representative linear relationship with hydrogen at a power of 14.42 mW and changed from 1.17 to 4.51 at 5 to 100 ppm hydrogen. In the static test system, the sensor demonstrated an obvious response to ethanol, ammonia, and glycol; the response to the target gas of ammonia at a concentration of 120 ppm reached up to 23.94. The power consumption of the sensor was only 16 mW with a platinum (Pt) heating resistor at 255 ℃.

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A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production

Cited by 19 publications

References 44 publications

Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors

Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors

Scaling Organic Electrochemical Transistors Down to Nanosized Channels

Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

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